US3710757A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Continuous deposition system
Assignee: Texas Instruments Inc
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Filing: 1970-12-09
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Granted: 1973-01-16
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Expires: 1990-12-09
Abstract
Abstract Means pass a substrate through a hemi tubular vapor deposition chamber disposed within a furnace means. A plurality of gas feed means pass through each end wall of, and extend substantially into, the chamber whereby to preheat the gases. Effluent gases pass out through the substrate entry and exit means.
Inventors
- 👤 W Porter
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 18:29
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/54; C30; C30B; C30B31/00; C30B31/02
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
155 words
A system for depositing a compound on a surface of each of a plurality of semiconductor slices, comprising in combination: a. a deposition chamber of hemitubular construction disposed within furnace means and having entrance and exit portals; b. at least first and second gas inlets passing through each of the two end walls of, and extending substantially into, said deposition chamber, whereby a gas passing through said inlets is preheated; c. means for passing boats containing horizontally positioned slices through said entrance portal, through said chamber and out said exit portal at a controlled rate; and d. means enclosing said chamber for heating said slices to a predetermined deposition temperature to form said compound on a surface of each of said slices as said slices pass through said chamber by decomposition of a gas, said gas entering said deposition chamber through said gas inlets and exiting said deposition chamber through said entrance and exit portals.
Claim 2
Independent Claim
155 words
A system for depositing a compound on a surface of each of a plurality of semiconductor slices, comprising in combination: a. a deposition chamber of hemitubular construction disposed within furnace means and having entrance and exit portals; b. at least first and second gas inlets passing through each of the two end walls of, and extending substantially into, said deposition chamber, whereby a gas passing through said inlets is preheated; c. means for passing boats containing horizontally positioned slices through said entrance portal, through said chamber and out said exit portal at a controlled rate; and d. means enclosing said chamber for heating said slices to a predetermined deposition temperature to form said compound on a surface of each of said slices as said slices pass through said chamber by decomposition of a gas, said gas entering said deposition chamber through said gas inlets and exiting said deposition chamber through said entrance and exit portals.
Claim 3
Dependent Claim
36 words
A system in accordance with claim 1 wherein both entrance and exit portals extend from said chamber about four inches, the openings of said portals being restricted in size to generally the dimensions of said boats.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-01-16 | 1976-07-17 | 1977-01-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-01-16 | 1980-07-17 | 1981-01-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-01-16 | 1984-07-17 | 1985-01-16 | $7700.00 | Window Closed / Lapsed |