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US3707410A Expired / Lapsed US ⏱️ 0.0 years remaining

Method of manufacturing semiconductor devices

Assignee: Hitachi Ltd
•
Filing: 1966-07-27
•
Granted: 1972-12-26
•
Expires: 1986-07-27
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Abstract

Abstract METHOD OF MANUFACTURE OF SEMICONDUCTOR DEVICES HAVING A PLANAR SURFACE INCLUDING INTRODUCING A FIRST IMPURITY THROUGH A MASK INTO A SUBSTRATE TO FORM A FIRST DOPED AREA AND INTRODUCING A SECOND IMPURITY THROUGH THE MASK INTO A SELECTED PORTION OF THE SUBSTRATE TO A DEPTH GREATER THAN THE DEPTH OF THE FIRST DOPED AREA SO AS TO UNDERLIE SAID AREA, SAID SECOND IMPURITY HAVING A DIFFUSIN CONSTANT WHICH IS GREATER THEN THAT OF SAID FIRST IMPURITY IN THE SUBSTRATE.

Inventors

  • 👤 Shoji Tauchi
  • 👤 Ichiro Miwa
  • 👤 Makoto Homma

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-26 17:57
CPC Classifications
H; H10; H10P; H10P32/00; H10D; H10D99/00; H10P95/00; Y; Y10; Y10S; Y10S148/00; Y10S148/04; Y10S148/041; Y10S148/049; Y10S148/106; Y10S148/145; Y10S148/151; Y10S148/157; Y10S438/00; Y10S438/914; Y10S438/919

Claims Analysis

Total Claims: 0
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References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1975-12-26 1976-06-26 1976-12-26 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1979-12-26 1980-06-26 1980-12-26 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1983-12-26 1984-06-26 1984-12-26 $7700.00 Window Closed / Lapsed

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