Patent US3705305A successfully refreshed from Google Patents.
US3705305A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Instrument for measuring the thickness of layers with radio-active nucleides
Assignee: Individual
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Filing: 1970-09-14
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Granted: 1972-12-05
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Expires: 1990-09-14
Abstract
Abstract An instrument for measuring the thickness of layers by means of radiation emitted from radio-active nucleides which interact with material of the layer and are then absolved by a radiation detector. A sighting mechanism determines the area of the layer to be irradiated and a diaphragm is interposed between the radioactive nucleide and the layer to define this area. A radiation detector on a supporting device can be moved into and out of a measuring position relative to this area. The sighting mechanism is operational when the radiation detector is out of measuring position and vice versa.
Inventors
- 👤 Helmut Fischer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 23:04
CPC Classifications
G; G01; G01B; G01B15/00; G01B15/02; G01B15/025
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
136 words
Measuring apparatus for measuring the thickness of layers by means of radiation emitted by radio-active nucleides which interact with the material of the layer and are then absorbed by a radiation detector, said apparatus comprising a sighting mechanism for determining the area of the layer to be irradiated, a diaphragm which is interposed between the radio-active nucleide and the layer to define the area for measurement, a supporting device and a radiation detector attached to said supporting device which can be moved towards the area to be measured and into a measuring position and away from the area to be measured and out of the measuring position, said sighting mechanism being in operation when said radiation detector is away from the measuring position and out of operation when said radiation detector is in the measuring position.
Claim 2
Dependent Claim
136 words
Measuring apparatus for measuring the thickness of layers by means of radiation emitted by radio-active nucleides which interact with the material of the layer and are then absorbed by a radiation detector, said apparatus comprising a sighting mechanism for determining the area of the layer to be irradiated, a diaphragm which is interposed between the radio-active nucleide and the layer to define the area for measurement, a supporting device and a radiation detector attached to said supporting device which can be moved towards the area to be measured and into a measuring position and away from the area to be measured and out of the measuring position, said sighting mechanism being in operation when said radiation detector is away from the measuring position and out of operation when said radiation detector is in the measuring position.
Claim 3
Dependent Claim
48 words
Measuring apparatus as claimed in claim 1, in which said sighting mechanism is a flying spot generator which is capable of casting onto the area to be measured a spot of light, the dimensions of which are of the order of those of the area to be measured.
Claim 4
Dependent Claim
25 words
Measuring apparatus as claimed in claim 2, in which the optical axis of said flying spot generator is approximately coaxial with the direction or radiation.
Claim 5
Dependent Claim
24 words
Measuring apparatus as claimed in claim 1 in which said radiation detector is located between said sighting mechanism and the area to be measured.
Claim 6
Dependent Claim
14 words
Measuring apparatus as claimed in claim 3 in which said optical axis is adjustable.
Claim 7
Dependent Claim
44 words
Measuring apparatus as claimed in claim 1 in which said sighting mechanism provides a spot of light in the form of a cross having two cross pieces intersecting at right angles and corresponding in width to the dimension of the area to be measured.
Claim 8
Dependent Claim
53 words
Measuring apparatus as claimed in claim 1 in which said diaphragm has an aperture for defining the area to be measured, is made of a material having a low atomic number and holds the radio-active nuclide in a support which opens towards the aperture, but does not transmit any radiation in other directions.
Claim 9
Dependent Claim
56 words
Measuring apparatus as claimed in claim 7, in which in the case of back-scattering said diaphragm can be attached to said radiation detector between the latter and the area to be measured and, alternatively in the case of irradiation said diaphragm can be placed in a support in a table beyond the area to be measured.
Claim 10
Dependent Claim
47 words
Measuring apparatus as claimed in claim 1 in which said diaphragm has an aperture which differs from circular shape, and adjusting means make it possible to bring a preferred direction of the aperture into alignment with a cross-piece of a light spot provided by said sighting mechanism.
Claim 11
Dependent Claim
33 words
Measuring apparatus as claimed in claim 1 in which said supporting device and said sighting mechanism are provided on a frame which can be pivoted through 180* about its approximately horizontal longitudinal axis.
Claim 12
Dependent Claim
29 words
Measuring apparatus as claimed in claim 10, in which the longitudinal axis is arranged at such a height above a supporting table that a free pivoting movement is possible.
Claim 13
Dependent Claim
44 words
Measuring apparatus as claimed in claim 10 in which said frame is connected to a column connected to a table by a floating axle and said suPporting device and said sighting mechanism are provided in the section of the frame removed from this axle.
Claim 14
Dependent Claim
29 words
Measuring apparatus as claimed in claim 10 in which the optical axis of said sighting mechanism, the longitudinal axis of said frame and the direction of radiation all intersect.
Claim 15
Dependent Claim
30 words
Measuring apparatus as claimed in claim 12 in which the area of said frame removed from said axle supports a magnifyer which is directed towards the area to be measured.
Claim 16
Dependent Claim
26 words
Measuring apparatus as claimed in claim 10 in which a source of general lighting is provided on said frame for illuminating the area to be measured.
Claim 17
Dependent Claim
30 words
Measuring apparatus as claimed in claim 1 in which a proofing foil having a high degree of reflection is provided on a table for supporting the layer to be measured.
Claim 18
Dependent Claim
91 words
Measuring apparatus as claimed in claim 1 which said supporting device on a frame and has a downward pointing guide pin which extends approximately perpendicular to a supporting table and approximately parallel to the direction of radiation, in which the radiation detector is rigidly secured under a sliding piece which is pivotably penetrated by said guide pin so as to be longitudinally slidable between two axial stops and in which there is provided at least one more stop which limits the pivoting movement in the operating position of the radiation detector.
Claim 19
Dependent Claim
38 words
Measuring apparatus as claimed in claim 17, in which said sliding piece comprises a bearing bush which can be adjusted without play, said bearing bush being penetrated by said guide pin and rigidly connected to said sliding piece.
Claim 20
Dependent Claim
49 words
Measuring apparatus as claimed in claim 17, in which said one more stop is a pin which is rigidly connected to said frame, projects downwards parallel to said guide pin and bears against a hollow groove of the sliding piece which has an opening angle of less than 270*.
Claim 21
Dependent Claim
22 words
Measuring apparatus as claimed in claim 19, in which an adjustable stop screw for said stop pin leads into said hollow groove.
Claim 22
Dependent Claim
129 words
Measuring apparatus as claimed in claim 17 in which a rotatable axle having an operating lever and a locking device in a plurality of rotary positions is provided parallel to and in the vicinity of said guide pin, one end of said axle driving a drivable spring rod, the free end of which co-operates with said sliding piece resiliently guiding the latter during its rotation, and on said axle there is provided a third stop which, with the aid of an interposed second spring, can move a stop pin which is longitudinally slidable in said frame and mounted preferably parallel to said guide pin in the direction of the area to be measured, and said stop pin bears against said sliding piece in the vicinity of said guide pin.
Claim 23
Dependent Claim
75 words
Measuring apparatus as claimed in claim 21, in which said rod-shaped second spring is clamped at both ends, one end being clamped on said frame and the other end on said stop pin, in which said third stop pushes this spring in the direction of the area to be measured, and in which there is provided a third spring which has a preliminary tension pushing said sliding piece away from the area to be measured.
Claim 24
Dependent Claim
31 words
Measuring apparatus as claimed in claim 22, in which said third spring is a helical spring, which is interposed between the free end of said guide pin and said sliding piece.
Claim 25
Dependent Claim
72 words
Measuring apparatus as claimed in claim 23, in which an attachment which is penetrated through an aperture at least by said diaphragm can be mounted on said frame or its cover when the radiation is projected upwards, in which said radiation detector can be rigidly, but releasably connected to said attachment, and in which an adjustable means in the form of a gallows for retaining the sample is located on said attachment.
Claim 26
Dependent Claim
58 words
Measuring apparatus as claimed in claim 24, in which there is provided a screw cap which, being screwed onto an external thread of said radiation detector and supported on said attachment near the edge of said aperture, draws said radiation detector into said Aperture in opposition to the force of said second and preferably also said third spring.
Claim 27
Dependent Claim
80 words
Measuring apparatus as claimed in claim 24, in which said cover comprises two shell sections, one including openings for said sighting mechanism and said rotating axle and the other including openings for looking through a magnifier, for said radiation detector and its movements, said guide pin and said stop pin, in which the two shell halves are identical in outline and have U-shaped cross sections, and in which they are clamped on said frame by means of two cover strips.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-12-05 | 1976-06-05 | 1976-12-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-12-05 | 1980-06-05 | 1980-12-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-12-05 | 1984-06-05 | 1984-12-05 | $7700.00 | Window Closed / Lapsed |