Patent US3703402A successfully refreshed from Google Patents.
US3703402A
Expired / Lapsed
US
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Electron sensitive compositions
Assignee: RCA Licensing Corp
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Filing: 1970-11-23
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Granted: 1972-11-21
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Expires: 1990-11-23
Abstract
Abstract CERTAIN UNSATURATED PARTIAL ESTERS OF MALEIC ANHYDRIDE COPOLYMERS WITH CERTAIN MONO-VINYLIDENE COMPOUNDS ARE INSENSITIVE TO ACTINIC LIGHT BUT EXTREMELY SENSITIVE TO ELECTRONS. THIN COATINGS OF THESE COMPOSITIONS ARE INSOLUBILIZED WITH A RADIATION DOSE TO GREATER THAN 5X10**-7 COUL./ CM.2, WHICH IS A MARKED IMPROVEMENT OVER THE MATERIALS NOW USED AS THE ELECTRON-SENSITIVE RESIST FOR MAKING HIGH RESOLUTION PHOTOMASKS, MICROICRUITS, ETC.
Inventors
- 👤 Herbert S Cole Jr
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 16:46
CPC Classifications
C; C08; C08F; C08F267/00; C08F267/06; G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; G03F7/0388
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-11-21 | 1976-05-22 | 1976-11-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-11-21 | 1980-05-22 | 1980-11-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-11-21 | 1984-05-22 | 1984-11-21 | $7700.00 | Window Closed / Lapsed |