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US3697793A Expired / Lapsed US ⏱️ 0.0 years remaining

Ion beam deflection system

Assignee: Raytheon Co
•
Filing: 1970-02-09
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Granted: 1972-10-10
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Expires: 1990-02-09
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Abstract

Abstract A single electrode has an insulated face upstream in the direction of the ion beam so that a charge builds up thereon to serve as a screen electrode. The electrode defines openings, and these openings have electrode metal on the sides thereof. The electrode metal serves as an accelerator electrode, when an accelerator voltage is applied thereto. When electrodes on different sides of the openings have different voltages applied thereto, they serve to deflect the ions so that they no longer form a beam symmetric about the arcs. The electrode is formed by producing bars which consist of two electrodes separated by electrically-insulative, glass-filled refractory, and with one edge of the bars optionally carrying an insulative nose thereon. These bars are assembled in egg crate configuration to define a plurality of electrode openings.

Inventors

  • 👤 Harry J King

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 17:27
CPC Classifications
F; F03; F03H; F03H1/00; F03H1/0037; F03H1/0043

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 90 words
An electrode structure for an ion beam deflection system, said electrode structure comprising: a plurality of first spaced bars extending in a first direction at generally right angles to an ion beam path; each of said bars comprising first and second metal plates having glass-filled ceramic therebetween, said metal plates being adapted to have an accEleration voltage applied thereto and have a differential ion beam deflection voltage applied thereto so that the ion beam can be deflected as it passes through the openings defined by said bars in said electrode.
Claim 2
Dependent Claim 90 words
An electrode structure for an ion beam deflection system, said electrode structure comprising: a plurality of first spaced bars extending in a first direction at generally right angles to an ion beam path; each of said bars comprising first and second metal plates having glass-filled ceramic therebetween, said metal plates being adapted to have an accEleration voltage applied thereto and have a differential ion beam deflection voltage applied thereto so that the ion beam can be deflected as it passes through the openings defined by said bars in said electrode.
Claim 3
Dependent Claim 36 words
The electrode of claim 1 wherein said ceramic comprises a porous refractory subcoat having a coefficient of thermal expansion substantially identical to said plates, and a low viscosity glass filler substantially filling said porous refractory subcoat.
Claim 4
Dependent Claim 46 words
The electrode of claim 1 wherein there are a plurality of second spaced bars extending in a second direction at an angle to said first spaced bars and generally at right angles to an ion beam path so that said bars define ion beam openings therebetween.
Claim 5
Dependent Claim 50 words
The electrode of claim 3 wherein said metal plates have notches therein, with the metal plates extending in the first direction having their notches interengaging with the notches and the metal plates extending in the second direction to maintain electrical isolation between the metal plates extending in the different directions.
Claim 6
Dependent Claim 27 words
The electrode of claim 4 wherein said bars extending in the first direction and said bars extending in the second direction are substantially in a common plane.
Claim 7
Dependent Claim 36 words
The electrode of claim 5 wherein said ceramic comprises a porous refractory subcoat having a coefficient of thermal expansion substantially identical to said plates, and a low viscosity glass filler substantially filling said porous refractory subcoat.
Claim 8
Dependent Claim 22 words
The electrode of claim 6 wherein said glass filler in said refractory subcoat is continuous between bars to form a unitary structure.
Claim 9
Independent Claim 129 words
The method of producing an electrode for an ion beam deflection system comprising the steps of: forming a plurality of notches in each of a plurality of metal electrostatic deflection plates; applying a porous refractory dielectric subcoat to one side of at least some of said deflection plates; assemblying said metal electrostatic deflection plates in pairs with porous refractory dielectric subcoat between the metal plates of each pair of metal plates and assemblying the pairs of metal plates with other pairs of metal plates extending in another direction with interengaged notches so that a gridwork of bars of metal plates is formed, each of the plates being electrically separate; filling the porous refractory dielectric subcoat with a low viscosity glass filler so that a unitary electrode structure is formed.
Claim 10
Independent Claim 129 words
The method of producing an electrode for an ion beam deflection system comprising the steps of: forming a plurality of notches in each of a plurality of metal electrostatic deflection plates; applying a porous refractory dielectric subcoat to one side of at least some of said deflection plates; assemblying said metal electrostatic deflection plates in pairs with porous refractory dielectric subcoat between the metal plates of each pair of metal plates and assemblying the pairs of metal plates with other pairs of metal plates extending in another direction with interengaged notches so that a gridwork of bars of metal plates is formed, each of the plates being electrically separate; filling the porous refractory dielectric subcoat with a low viscosity glass filler so that a unitary electrode structure is formed.
Claim 11
Dependent Claim 45 words
The process of claim 8 wherein said filling step comprises heating said porous refractory dielectric subcoat with glass filler material in contact therewith to a temperature sufficient to bring the glass filler to low viscosity, but below the fusion temperature of said refractory dielectric subcoat.

References Cited (Backward Citations)

US3279176A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1975-10-10 1976-04-10 1976-10-10 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1979-10-10 1980-04-10 1980-10-10 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1983-10-10 1984-04-10 1984-10-10 $7700.00 Window Closed / Lapsed

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