Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
90 words
An electrode structure for an ion beam deflection system, said electrode structure comprising: a plurality of first spaced bars extending in a first direction at generally right angles to an ion beam path; each of said bars comprising first and second metal plates having glass-filled ceramic therebetween, said metal plates being adapted to have an accEleration voltage applied thereto and have a differential ion beam deflection voltage applied thereto so that the ion beam can be deflected as it passes through the openings defined by said bars in said electrode.
Claim 2
Dependent Claim
90 words
An electrode structure for an ion beam deflection system, said electrode structure comprising: a plurality of first spaced bars extending in a first direction at generally right angles to an ion beam path; each of said bars comprising first and second metal plates having glass-filled ceramic therebetween, said metal plates being adapted to have an accEleration voltage applied thereto and have a differential ion beam deflection voltage applied thereto so that the ion beam can be deflected as it passes through the openings defined by said bars in said electrode.
Claim 3
Dependent Claim
36 words
The electrode of claim 1 wherein said ceramic comprises a porous refractory subcoat having a coefficient of thermal expansion substantially identical to said plates, and a low viscosity glass filler substantially filling said porous refractory subcoat.
Claim 4
Dependent Claim
46 words
The electrode of claim 1 wherein there are a plurality of second spaced bars extending in a second direction at an angle to said first spaced bars and generally at right angles to an ion beam path so that said bars define ion beam openings therebetween.
Claim 5
Dependent Claim
50 words
The electrode of claim 3 wherein said metal plates have notches therein, with the metal plates extending in the first direction having their notches interengaging with the notches and the metal plates extending in the second direction to maintain electrical isolation between the metal plates extending in the different directions.
Claim 6
Dependent Claim
27 words
The electrode of claim 4 wherein said bars extending in the first direction and said bars extending in the second direction are substantially in a common plane.
Claim 7
Dependent Claim
36 words
The electrode of claim 5 wherein said ceramic comprises a porous refractory subcoat having a coefficient of thermal expansion substantially identical to said plates, and a low viscosity glass filler substantially filling said porous refractory subcoat.
Claim 8
Dependent Claim
22 words
The electrode of claim 6 wherein said glass filler in said refractory subcoat is continuous between bars to form a unitary structure.
Claim 9
Independent Claim
129 words
The method of producing an electrode for an ion beam deflection system comprising the steps of: forming a plurality of notches in each of a plurality of metal electrostatic deflection plates; applying a porous refractory dielectric subcoat to one side of at least some of said deflection plates; assemblying said metal electrostatic deflection plates in pairs with porous refractory dielectric subcoat between the metal plates of each pair of metal plates and assemblying the pairs of metal plates with other pairs of metal plates extending in another direction with interengaged notches so that a gridwork of bars of metal plates is formed, each of the plates being electrically separate; filling the porous refractory dielectric subcoat with a low viscosity glass filler so that a unitary electrode structure is formed.
Claim 10
Independent Claim
129 words
The method of producing an electrode for an ion beam deflection system comprising the steps of: forming a plurality of notches in each of a plurality of metal electrostatic deflection plates; applying a porous refractory dielectric subcoat to one side of at least some of said deflection plates; assemblying said metal electrostatic deflection plates in pairs with porous refractory dielectric subcoat between the metal plates of each pair of metal plates and assemblying the pairs of metal plates with other pairs of metal plates extending in another direction with interengaged notches so that a gridwork of bars of metal plates is formed, each of the plates being electrically separate; filling the porous refractory dielectric subcoat with a low viscosity glass filler so that a unitary electrode structure is formed.
Claim 11
Dependent Claim
45 words
The process of claim 8 wherein said filling step comprises heating said porous refractory dielectric subcoat with glass filler material in contact therewith to a temperature sufficient to bring the glass filler to low viscosity, but below the fusion temperature of said refractory dielectric subcoat.