Patent US3697330A successfully refreshed from Google Patents.
US3697330A
Expired / Lapsed
US
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Liquid epitaxy method and apparatus
Assignee: Unisys Corp
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Filing: 1970-03-27
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Granted: 1972-10-10
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Expires: 1990-03-27
Abstract
Abstract A METHOD AND APPARATUS FOR PRACTICING LIQUID-PHASE EPITAXIAL PURIFICATION OF SEMICONDUCTOR MATERIALS AND FOR THE PREPARATION OF SEMICONDUCTOR FILMS OR JUNCTION SEMICONDUCTOR DEVICES EMPLOYS A NOVEL CLOSED CYLINDRICAL GRAPHITE CRUCIBLE ELEMENT. THE MOLTEN MATERIAL TO BE DEPOSITED ON A SUBSTRATE IS BROUGHT INTO CONTACT WITH THE SUBSTRATE BY SIMPLE ROTATION OF THE CRUCIBLE ABOUT AN AXIS OF SYMMETRY.
Inventors
- 👤 Henry T Minden
- 👤 John A Donahue
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 03:25
CPC Classifications
C; C30; C30B; C30B19/00; C30B19/06; C30B19/061
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-10-10 | 1976-04-10 | 1976-10-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-10-10 | 1980-04-10 | 1980-10-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-10-10 | 1984-04-10 | 1984-10-10 | $7700.00 | Window Closed / Lapsed |