Method for detecting the position and direction of a fine object

Claim 3

A method according to claim 1 wherein the step of generating said signals L1'' to Ln'' includes: shaping signals obtained by said scanning of said magnified images; delaying successively by a prescribed length of time a plurality of the signal components obtained by shaping the signals derived by scanning the magnified image of each pattern with one scanning line so as to generate said signal components simultaneously; and generating output signals L1'' to Ln'' corresponding to scanning lines L1 to Ln only when said delayed signals are present at the same time.

Claim 4

A method according to claim 1 wherein the step of operating on said signals L1'' to Ln'' comprises: progressively delaying said signals L1'' to Ln'' to generate said signals L1'' to Ln'' simultaneously; obtaining OR logical outputs (L1'' +L2''), (L3'' +L4'') ... and (Ln 1+Ln'') respectively corresponding to logical of said signals L1'' and L2'', L3'' and L4'' ..., and Ln 1'' and Ln'', which pairs of signals are obtained by scanning with two successive scanning lines; obtaining first AND logical signals (L1'' +L2'').(L3''+L4'')... (Ln 1''+Ln'') corresponding to said OR ological outputs; obtaining second AND logical signals (L1'' +L2''.....Ln/2) corresponding to signals (L1'', L2'' ... Ln/2'') obtained by scanning with scanning lines having a n/2 number; and obtaining an OR logical output (L1''+L2'') : (L3''+L4'').....(Ln 1''+Ln'')+(L1''. L2'' .L2''.(Ln/2'') from said first and second AND logical signals.

Claim 5

A method according to claim 1 wherein the step of operating on said output for detecting the position and direction pattern images comprises: first delaying the position pattern signals only by the operation time required to carry out the operations on said L1'' to Ln'' signals; generating AND logical signals from said output signal generated by operating on said L1'' to Ln'' signals and the output from first delaying the position pattern signals; second delaying signals representing the direction pattern image only by the operation time required to carry out the operations on said L1'' to Ln''signals; and generating AND logical signals from said output signal generated by operating on said L1'' to Ln'' signals and output from second delaying said signals representing said direction pattern image.

Claim 6

A method according to claim 1 including: generating signals corresponding to values for defining the axes of a co-ordinate system; counting the number of scanning lines required to obtain signals for detecting the position detecting pattern image and generating counting output signals corresponding to said number; measuring a lEngth of time required for one scanning line to reach the position detecting pattern image and generating a time measure signal corresponding to said length of time; subtracting at least one of said counting output signals and said time-measure signal and those generated signals corresponding to values defining the co-ordinate axes; counting the number of scanning lines used in obtaining the signal for detecting a direction detecting pattern image; measuring a length of time required for one scanning line to reach said direction detecting pattern; and determining the angle at which the fine object is inclined to the co-ordinate axes by operating on the output signals from said counting and time-measuring steps.

Claim 7

Apparatus for detecting the position and direction of a fine object which has a position detecting pattern and a direction detecting pattern on the surface thereof comprising: means for projecting a magnified image of said fine object; means for scanning said magnified image; means for generating first pulses having a prescribed width, interval and number responsive to scanning said position detecting pattern, and for generating second pulses of another prescribed width, interval and number responsive to said direction detecting pattern, said first and second pulses being in spaced relationship with each other; means for picking up said first and second pulses; said means for scanning including means for producing scanning lines L1 to Ln having an n number (n > or = 6) and for generating signals L1'' to Ln'', containing information corresponding to said first and second pulses; means including a first delay means for operating on said signals L1'' to Ln'', including delaying said signals by predetermined amounts by means of said first delay means, to generate an output in accordance with the logical relationship (L1'' +L2'').(L3'' +L4'') ... (Ln 1'' +Ln'')+(L1'' .L2'' ...Ln/2'') 1; means including a second delay means for operating on said output, including delaying said output by predetermined amounts by means of said second delay means, to separate said output into first signals for detecting a position pattern image and second signals for detecting a direction pattern image, said first and second signals defining the position and direction of the fine object.

Claim 8

Apparatus for detecting the position and direction of a fine object which has a position detecting pattern and a direction detecting pattern on the surface thereof comprising: means for projecting a magnified image of said fine object; means for scanning said magnified image; means for generating first pulses having a prescribed width, interval and number responsive to scanning said position detecting pattern, and for generating second pulses of another prescribed width, interval and number responsive to said direction detecting pattern, said first and second pulses being in spaced relationship with each other; means for picking up said first and second pulses; said means for scanning including means for producing scanning lines L1 to Ln having an n number (n > or = 6) and for generating signals L1'' to Ln'', containing information corresponding to said first and second pulses; means including a first delay means for operating on said signals L1'' to Ln'', including delaying said signals by predetermined amounts by means of said first delay means, to generate an output in accordance with the logical relationship (L1'' +L2'').(L3'' +L4'') ... (Ln 1'' +Ln'')+(L1'' .L2'' ...Ln/2'') 1; means including a second delay means for operating on said output, including delaying said output by predetermined amounts by means of said second delay means, to separate said output into first signals for detecting a position pattern image and second signals for detecting a direction pattern image, said first and second signals defining the position and direction of the fine object.

Claim 9

Apparatus according to claim 6 wherein said means for generating said signals L1'' to Ln'' includes: means for shaping signals obtained by said scanning of said magnified images; said first delay means delaying successively by a prescribed length of time a plurality of the signal components from said shaping means, which signal components are obtained by shaping the signals derived by scanning the magnified image of each pattern with one scanning line so as to generate said signal components simultaneously; and means for generating output signals L1'' to Ln'' corresponding to scanning lines L1 to Ln only when said delayed signals are present at the same time.

Claim 10

Apparatus according to claim 6 wherein said means for operating on said signals L1'' to Ln'' comprises: said first delay means for progressively delaying said signals L1'' to Ln'' to generate said signals L1'' to Ln'' simultaneously; first logical OR means for generating first OR logical outputs (L1'' +L2''), (L3'' +L4'') ... and (Ln 1+Ln'') respectively corresponding to pairs of said signals L1'' and L2'', L3'' and L4'' ..., and Ln 1'' and Ln'', whicH pairs of signals are obtained by scanning with two successive scanning lines; first logical AND means for receiving said OR logical outputs and generating first AND logical signals (L1''+L2''). (L3''+L4'')... (Ln 1''+Ln'') corresponding to said OR logical outputs; second logical AND means for generating second AND logical signals (L1''.L2''.corresponding to signals (L1'', L2'' ... Ln/2'') obtained by scanning with scanning lines having a n/2 number; and second logical OR means coupled to said first and second logical AND means for generating an OR logical output (L1''+L2'') . (L3''+L4'').... .(Ln 1''+Ln'')+(L1''.L2''.L2''.....(Ln/2'') from said first and second AND logical signals.

Claim 11

Apparatus according to claim 6 wherein said means for operating on said output for detecting the position and direction pattern images comprises: said second delay means for delaying the position pattern signals only by the operation time required to carry out the operations on said L1'' to Ln'' signals by the first mentioned operating means; third logical AND means coupled to said second delay means and to said first mentioned operating means for generating third AND logical signals from said output signal generated by operating on said L1'' to Ln'' signals and the output from second delay means; third delay means for delaying signals representing the direction pattern image only by the operation time required to carry out the operations on said L1'' to Ln'' signals by said first mentioned operating means; and fourth logical AND means coupled to said third delay means and to said first mentioned operating means for generating AND logical signals from said output signal generated by operating on said L1'' to Ln'' signals and the output from third delay means, said signals representing said direction pattern image.

Claim 12

Apparatus according to claim 6 including: means for generating signals corresponding to values for defining the axes of a co-ordinate system; first counting means for counting the number of scanning lines required to obtain signals for detecting the position detecting pattern image and for generating first counting output signals corresponding to said number; measuring means for measuring a length of time required for one scanning line to reach the position detecting pattern image and for generating a time measure signal corresponding to said length of time; means for subtracting at least one of said counting output signals and said time-measure signal and those generated signals corresponding to said values defining the co-ordinate axes; second counting means for counting the number of scanning lines used in obtaining the signal for detecting a direction detecting pattern image; measuring means for measuring a length of time required for one scanning line to reach said direction detecting pattern; and means coupled to said counting and measuring means for calculating the angle at which the fine object is inclined to the co-ordinate axes by operating on the output signals from said counting and time-measuring means.