Patent US3679517A successfully refreshed from Google Patents.
US3679517A
Expired / Lapsed
US
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Apparatus for etching semiconductor bodies
Assignee: Robert Bosch GmbH
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Filing: 1970-03-25
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Granted: 1972-07-25
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Expires: 1990-03-25
Abstract
Abstract An apparatus for etching semiconductor bodies comprising a receptacle which accommodates a bath of etching fluid. A drum is mounted for rotation in the etching fluid about an at least substantially horizontal axis and is driven by drive means. Partitions separate the interior of the drum into a plurality of axially arrayed cells each of which extends transversely of the axis and has a cross-sectional area divergent from the region of the axis in radially outward direction, defining with the inner peripherery of the drum a concavely curved guide path which annularly surrounds the axis and along which the semiconductor bodies to be etched travel in an orbit about the axis.
Inventors
- 👤 Reinhard Schulten
- 👤 Hartmut Michel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 06:37
CPC Classifications
B; B01; B01L; B01L7/00; B01L7/02; C; C23; C23F; C23F1/00; C23F1/08; G; G05; G05D; G05D23/00; G05D23/19; Y; Y10; Y10S; Y10S134/00; Y10S134/902
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-07-25 | 1976-01-24 | 1976-07-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-07-25 | 1980-01-24 | 1980-07-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-07-25 | 1984-01-24 | 1984-07-25 | $7700.00 | Window Closed / Lapsed |