Conductor elements spaced from microelectronic component surface and methods of making the same
Abstract
Abstract A MICROELECTRONIC COMPONENT IS PROVIDED WITH A CONDUCTIVE MEMBER HAVING ONE OR MORE EXTREMITIES AFFIXED TO AND SUPPORTED BY A SUBSTRATE, SUCH AS AN INTEGRATED CIRCUIT, AND AN EXTENDED PORTION FROM AN EXTREMITY THAT IS, OR BETWEEN TWO EXTREMITIES THAT ARE, IN PERMANENTLY FIXED SPACED RELATION, SUBSTANTIALLY PRALLEL TO THE SUBSTRATE WITHOUT INTERVENING SUPPORT MATERIAL. THE CONDUCTIVE MEMBER MAY BE USED FOR VARIOUS PURPOSES SUCH AS FOR THE VIBRATORY MEMBER OF A RESONANT GATE TRANSISTOR OR A CONDUCTIVE BRIDGE CROSSING OVER ELEMENTS OF AN INTEGRATED CIRCUIT. THE CONDUCTIVE MEMBER MAY BE FORMED BY A METHOD INCLUDING USE OF A SPACER LAYER IN THE POSITION OF THE EXTENDED PORTION FOR DEPOSITION THEREOF FOLLOWED BY REMOVAL OF THE SPACER LAYER.
Inventors
- 👤 Harvey C Nathanson
- 👤 Robert A Wickstrom
Bibliographic Details
Claims Analysis
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