Patent US3671823A successfully refreshed from Google Patents.
US3671823A
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US
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Thin film capacitor including an aluminum underlay
Assignee: AT&T Inc
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Filing: 1971-07-01
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Granted: 1972-06-20
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Expires: 1991-07-01
Abstract
Abstract The use of an aluminum film beneath the tantalum anode of a tantalum thin film capacitor results in a significant enhancement in the frequency response of the capacitor and a lower dissipation factor at frequencies above 10 kilohertz than normally evidenced by devices not including the aluminum film.
Inventors
- 👤 Raymond Charles Pitetti
- 👤 Walter Worobey
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 19:31
CPC Classifications
H; H01; H01G; H01G4/00; H01G4/30; Y; Y10; Y10T; Y10T29/00; Y10T29/43; Y10T29/435
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
12 words
Capacitor in accordance with claim 1 wherein said film-forming metal is tantalum.
Claim 2
Dependent Claim
82 words
Technique for the fabrication of a thin film capacitor comprising the steps of (a) depositing a layer of a film-forming metal selected from the group consisting of tantalum, niobium, hafnium, zirconium, and titanium upon a substrate member; (b) generating a desired pattern in said film-forming metal by photoengraving techniques; (c) partially anodizing the resultant film-forming metal; and (d) depositing a counterelectrode, CHARACTERIZED IN THAT a layer of aluminum is deposited upon said substrate prior to the deposition thereon of said film-forming metal.
Claim 3
Dependent Claim
15 words
Technique in accordance with claim 3 wherein said aluminum is deposited by vacuum evaporation techniques.
Claim 4
Dependent Claim
26 words
Technique in accordance with claim 4 wherein said substrate is heated to a temperature of the order of 350* Centigrade during the deposition of aluminum thereon.
Claim 5
Dependent Claim
12 words
Technique in accordance with claim 4 wherein said film-forming metal is tantalum.
References Cited (Backward Citations)
US2993266A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-06-20 | 1975-12-20 | 1976-06-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-06-20 | 1979-12-20 | 1980-06-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-06-20 | 1983-12-20 | 1984-06-20 | $7700.00 | Window Closed / Lapsed |