Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
126 words
Device for crucible-free zone melting of a rod consisting of semiconductor material, comprising a vessel accommodating the semiconductor rod; an induction heating coil positioned coaxially with the rod inside the vessel; an AC current source; and an AC current supply for the induction heating coil comprising electrical conducting means connected to the AC current source and passing gas-tight through the wall of the vessel, the part of the electrical conducting means passing through the wall of the vessel comprising a plurality of tubular single electrical conductors coaxially positioned relative to each other with the tubular single conductors divided into two groups, each of the groups consisting of single conductors connected in parallel and each single conductor being adjacent only to single conductors of the other group.
Claim 2
Dependent Claim
126 words
Device for crucible-free zone melting of a rod consisting of semiconductor material, comprising a vessel accommodating the semiconductor rod; an induction heating coil positioned coaxially with the rod inside the vessel; an AC current source; and an AC current supply for the induction heating coil comprising electrical conducting means connected to the AC current source and passing gas-tight through the wall of the vessel, the part of the electrical conducting means passing through the wall of the vessel comprising a plurality of tubular single electrical conductors coaxially positioned relative to each other with the tubular single conductors divided into two groups, each of the groups consisting of single conductors connected in parallel and each single conductor being adjacent only to single conductors of the other group.
Claim 3
Dependent Claim
21 words
Device according to claim 1, wherein said tubular conductors are mutually telescoped and are formed with a channel for a coolant.
Claim 4
Dependent Claim
62 words
Device according to claim 1, wherein said tubular conductors have radial spacing therebetween and said radial spacing between said tubular conductors is filled with insulating material having a Shore hardness in the range of 10 to 100 and an extensibility of at least 20 percent, a gas-tight adhesive connection being provided between said insulating material and the surface of said tubular conductors.
Claim 5
Dependent Claim
29 words
Device according to claim 3 wherein said insulating material is silicon rubber, and the surface of said tubular conductors in said radial spacing has a coating of silicon resin.
Claim 6
Dependent Claim
113 words
Device for zone-melting a crystalline rod comprising a vessel, an induction heating coil mounted in said vessel for heating a molten zone formed in a crystalline rod, and an electric current supply for the induction heating coil extending into said vessel through an opening formed in a wall of said vessel, said current supply comprising a plurality of mutually telescoped conductor tubes radially spaced from one another, said plurality of telescoped conductor tubes, respectively, numbered sequentially, in radial direction, having all of the tubes of uneven number, on the one hand, and all of the tubes of even number, on the other hand, electrically conductively connected at both ends of said current supply.
Claim 7
Dependent Claim
113 words
Device for zone-melting a crystalline rod comprising a vessel, an induction heating coil mounted in said vessel for heating a molten zone formed in a crystalline rod, and an electric current supply for the induction heating coil extending into said vessel through an opening formed in a wall of said vessel, said current supply comprising a plurality of mutually telescoped conductor tubes radially spaced from one another, said plurality of telescoped conductor tubes, respectively, numbered sequentially, in radial direction, having all of the tubes of uneven number, on the one hand, and all of the tubes of even number, on the other hand, electrically conductively connected at both ends of said current supply.
Claim 8
Dependent Claim
18 words
Device according to claim 5 wherein said conductor tubes are numbered sequentially in order of their increasing diameter.
Claim 9
Dependent Claim
18 words
Device accOrding to claim 5 wherein said conductor tubes are numbered sequentially in order of their decreasing diameter.