Patent US3671313A successfully refreshed from Google Patents.
US3671313A
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US
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Surface contaminant removal
Assignee: Texas Instruments Inc
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Filing: 1969-11-13
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Granted: 1972-06-20
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Expires: 1989-11-13
Abstract
Abstract IN THE FABRICATION OF A SEMICONDUCTOR DEVICE HAVING ACITVE AREAS DEFINE THEREIN, SURFACE CONTAMINANTS ARE REMOVED BY BOMBARDING THE DEFINED AREAS WITH HYDROGEN IONS. THE HYDROGEN ION BOMBARDMENT IS COMPLETED IN AN EVACUATED CHAMBER BACKFILLED WITH HYDROGEN TO A PRESSURE ON THE ORDER OF 100 MICRONS OF HG. A GLOW DISCHARGE IS ESTABLISHED IN THE BACKFILLED EVACUATED CHAMBER TO PRODUCE ATOMIC HYDROGEN THAT REACTS WITH THE CONTAMINANTS WHICH THEN DESORB THE SEMICONDUCTOR SURFACE. A PROTECTIVE FILM IS EVAPORATED OVER THE CLEANED SURFACE TO PREVENT FURTHER CONTAMINATION THEREOF.
Inventors
- 👤 Richard A Reynolds
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 16:22
CPC Classifications
H; H10; H10F; H10F71/00; H10F71/125; H10F71/1253; H10D; H10D99/00; H10F99/00; H10P; H10P14/00; H10P14/60; H10P50/00; H10P50/20; H10P52/00; H10P95/00; H10P95/70; H10W; H10W74/00; H10W74/40; Y; Y10; Y10S; Y10S438/00; Y10S438/906
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-06-20 | 1975-12-20 | 1976-06-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-06-20 | 1979-12-20 | 1980-06-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-06-20 | 1983-12-20 | 1984-06-20 | $7700.00 | Window Closed / Lapsed |