Electrical components, electrical circuits, and the like, and methods for making the same by means of radiation sensitive elements

Claim 1

The method of claim 1 further comprising the steps of: continuously monitoring the electrical characteristics of said radiation sensitive element during exposure thereof to said electromagnetic actinic radiation; and discontinuing said exposure when predetermined electrical characteristics of said radiation sensitive element are achieved.

Claim 2

A method for making a resistor by means of a radiation sensitive element comprising a first layer of a relatively low electrical resistivity material juxtaposed with and adhered to a second layer of a relatively high electrical resistivity inorganic material different from that of said first layer and capable when exposed to electromagnetic actinic radiation to interreact with said first layer so as to form an interreaction product having an electrical resistivity intermediate to the resistivities of respectively said low and high resistivity materials, wherein said first layer is selected from the group consisting of silver, copper, lead, cadmium, zinc, iron, tin, arsenic, bismuth, cobalt, germanium, indium, manganese, mercury, nickel, selenium, silicon, tellurium, thallium and vanadium, the inorganic material of said second layer is substantially transmissive of said actinic radiation and is selected from the group consisting of sulfur, selenium, M-X compounds and mixtures and M-X-Y compounds and mixtures, wherein M is a metal selected from the group consisting of arsenic, antimony, bismuth, selenium, tellurium, copper, zinc, cadmium, mercury, lead, chromium, gallium, indium, thallium, germanium, tin, iron, cobalt, nickel and silver, and X and Y are selected from the group consisting of halogen, sulfur, selenium and tellurium, said method comprising: exposing said radiation sensitive element to incident electromagnetic actinic radiation with an intensity and for a period of time sufficient for causing the formation of a predetermined amount of said interreaction product of said intermediate resistivity with consumption in depth of a portion of said first layer; providing said radiation sensitive element with electrical terminals; and permanently shielding said radiation sensitive element from said incident electromagnetic actinic radiation for preventing further formation of said interreaction product.

Claim 6

A method for making a capacitor by means of a radiation sensitive element comprising a first layer of a relatively low electrical resistivity material defining a first plate of said capacitor juxtaposed with and adhered to a second layer of a relatively high electrical resistivity inorganic material different from that of said first layer and capable when exposed to electromagnetic actinic radiation to interreact with said first layer so as to form an interreaction product having an electrical resistivity intermediate to the resistivities of respectively said low and high resistivity materials, said first layer being in turn disposed on a face of a dielectric provided with a metallic layer on the other face thereof defining a second plate of said capacitor, wherein said first layer is selected from the group consisting of silver, copper, lead, cadmium, zinc, iron, tin, arsenic, bismuth, cobalt, germanium, indium, manganese, mercury, nickel, selenium, silicon, tellurium, thallium and vanadium, the inorganic material of said second layer is substantially transmissive of said actinic radiation and is selected from the group consisting of sulfur, selenium, M-X compounds and mixtures and M-X-Y compounds and mixtures, wherein M is a metal selected from the group consisting of arsenic, antimony, bismuth, selenium, tellurium, copper, zinc, cadmium, mercury, lead, chromium, gallium, indium, thallium, germanium, tin, iron, cobalt, nickel and silver, and X and Y are selected from the group consisting of halogen, sulfur, selenium and tellurium, said method comprising: exposing said radiation sensitive element to incident electromagnetic actinic radiation with an intensity and for a period of time sufficient for causing the formation of a predetermined amount of said interreaction product of said intermediate resistivity with consumption in depth of a portion of said first layer for trimming the area of said first plate to a predetermined area; providing said first layer and said metallic layer with electrical terminals; and permanently shielding said radiation sensitive element from said incident electromagnetic actinic radiation for preventing further formation of said interreaction product.

Claim 8

A method for making an electrical circuit comprising at least a resistor and a capacitor, electrical connections therebetween and input and output terminals, by means of a radiation sensitive element comprising a first layer of a relatively low resistivity material juxtaposed with and adhered to a second layer of a relatively high resistivity inorganic material different from that of said first layer and capable when exposed to electromagnetic actinic radiation to interreact with said first layer so as to form an interreaction product having an electrical resistivity intermediate to the resistivities of respectively said low and high resistivity materials, said first layer being in turn disposed on a face of a dielectric provided with a metallic layer on the other face therewith, wherein said first layer is selected from the group consisting of silver, copper, lead, cadmium, zinc, iron, tin, arsenic, bismuth, cobalt, germanium, indium, manganese, mercury, nickel, selenium, silicon, tellurium, thallium and vanadium, the inorganic material of said second layer is substantially transmissive of said actinic radiation and is selected from the group consisting of sulfur, selenium, M-X compounds and mixtures and M-X-Y compounds and mixtures, wherein M is a metal selected from the group consisting of arsenic, antimony, bismuth, selenium, tellurium, copper, zinc, cadmium, mercury, lead, chromium, gallium, indium, thallium, germanium, tin, iron, cobalt, nickel And silver, and X and Y are selected from the group consisting of halogen, sulfur, selenium and tellurium, said method comprising: exposing areas of said radiation sensitive element to incident electromagnetic actinic radiation projected thereon according to a predetermined pattern with an intensity and for a period of time sufficient for causing the formation of said interreaction product consuming in depth all of said first layer at said areas; simultaneously shielding from said incident electromagnetic actinic radiation other areas of said radiation sensitive element in a predetermined pattern for leaving in said first layer an electrically conducting network defining said resistor, a first plate of said capacitor and electrical connections therebetween; simultaneously partly exposing to incident electromagnetic actinic radiation a first portion of said other areas corresponding to said resistor with an intensity and for a period of time sufficient for causing the formation of said interreaction product with consumption in depth of part of said first layer for forming said resistor at a predetermined resistance value; simultaneously exposing a second portion of said other areas corresponding to said first plate of said capacitor with an intensity and for a period of time sufficient for causing the formation of said interreaction product consuming in depth said first layer for trimming the area of said plate for defining a predetermined capacitance for said capacitor; attaching electrical terminals to appropriate portions of said first layer and to said metallic layer for forming said input and output terminals; and permanently shielding said radiation sensitive element from said incident electromagnetic actinic radiation for preventing further formation of said interreaction product.

Claim 10

A method for making an electrical circuit comprising resistors and at least a capacitor, electrical connections therebetween and input and output terminals, by means of a radiation sensitive element comprising a layer of dielectric having on both faces thereof a first layer of a first material juxtaposed with and adhered to a second layer of an inorganic material different from said first material capable when exposed to electromagnetic actinic radiation to interreact with said first material so as to form an interreaction product having an electrical resistivity intermediate to the resistivities of respectively said first and second materials, wherein said first layer is selected from the group consisting of silver, copper, lead, cadmium, zinc, iron, tin, arsenic, bismuth, cobalt, germanium, indium, manganese, mercury, nickel, selenium, silicon, tellurium, thallium and vanadium, the inorganic material of said second layer is substantially transmissive of said actinic radiation and is selected from the group consisting of sulfur, selenium, M-X compounds and mixtures and M-X-Y compounds and mixtures, wherein M is a metal selected from the group consisting of arsenic, antimony, bismuth, selenium, tellurium, copper, zinc, cadmium, mercury, lead, chromium, gallium, indium, thallium, germanium, tin, iron, cobalt, nickel and silver, and X and Y are selected from the group consisting of halogen, sulfur, selenium and tellurium, said method comprising: exposing areas of said radiation sensitive element to incident electromagnetic actinic radiation projected on both faces thereof according to predetermined patterns with an intensity and for a period of time sufficient for causing the formation of said interreaction product consuming in depth all of the material of said first layer at said areas; simultaneously shielding from said incident electroMagnetic actinic radiation other areas of said radiation sensitive element in a predetermined pattern for leaving in said first layer an electrically conducting network defining said resistors, opposed plates of said capacitor and electrical connections therebetween; simultaneously partly exposing to incident electromagnetic actinic radiation a first portion of said other areas corresponding to said resistors with an intensity and for a period of time sufficient for causing the formation of said interreaction product with consumption in depth of part of said first layers for forming said resistors at a predetermined resistance value; simultaneously exposing to incident electromagnetic actinic radiation a second portion of said other areas corresponding to said plates of said capacitor with an intensity and for a period of time sufficient for causing the formation of said interreaction product consuming in depth said first layers for trimming the area of said plates for defining a predetermined capacitance for said capacitor; attaching electrical terminals to appropriate portions of said first layers for forming said input and output terminals; and permanently shielding said element from said incident electromagnetic actinic radiation for preventing further formation of said interreaction product.