Patent US3662708A successfully refreshed from Google Patents.
US3662708A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for supporting a substrate holder
Assignee: Airco Inc
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Filing: 1970-03-23
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Granted: 1972-05-16
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Expires: 1990-03-23
Abstract
Abstract Apparatus is described for supporting a substrate holder in a vacuum coating system. The substrate holder is supported and, if desired, rotated within the vacuum system by an electromagnetically energized armature.
Inventors
- 👤 Robert Leland Shrader
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 14:11
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/305; H01J37/3053; C; C23; C23C; C23C14/00; C23C14/22; C23C14/50; C23C14/505; C23C14/56
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
107 words
In a vacuum coating system apparatus for supporting a substrate holder wherein at least part of the substrate holder is ferromagnetic, comprising, an electromagnetic coil, means for supporting said electromagnetic coil within the vacuum coating system, an armature for engaging the ferromagnetic part of the substrate holder, a shaft supporting said armature adjacent said coil so that said armature is magnetized upon energization of said coil for holding the ferromagnetic part of the substrate holder and thereby supporting the substrate holder, and means for rotating said shaft to theReby rotate the substrate holder, said coil supporting means including means for moving said coil and said armature axially.
Claim 2
Dependent Claim
107 words
In a vacuum coating system apparatus for supporting a substrate holder wherein at least part of the substrate holder is ferromagnetic, comprising, an electromagnetic coil, means for supporting said electromagnetic coil within the vacuum coating system, an armature for engaging the ferromagnetic part of the substrate holder, a shaft supporting said armature adjacent said coil so that said armature is magnetized upon energization of said coil for holding the ferromagnetic part of the substrate holder and thereby supporting the substrate holder, and means for rotating said shaft to theReby rotate the substrate holder, said coil supporting means including means for moving said coil and said armature axially.
Claim 3
Dependent Claim
80 words
Apparatus according to claim 1 wherein said coil supporting means include a support assembly supporting said coil and said shaft, said shaft being rotatable with respect to said support assembly, a cam body having at least one cam surface thereon, at least one cam follower secured to said support assembly and engaging said cam surface, and means for displacing said cam body to cause said cam surface to displace said support assembly and thereby displace said coil and said armature.
Claim 4
Dependent Claim
15 words
Apparatus according to claim 2 wherein said rotating means are mounted to said support assembly.
Claim 5
Dependent Claim
46 words
Apparatus according to claim 2 wherein said cam body comprises a hollow cylinder surrounding said support assembly, wherein said cam surfaces comprise a plurality of tracks in the wall of said cam body, and wherein said displacing means displace said cam body about its axis rotationally.
Claim 6
Dependent Claim
57 words
Apparatus according to claim 2 including means for mounting said apparatus over an opening in a vacuum enclosure of the vacuum coating system, and a generally cylindrical bellows attached to said support assembly and said mounting means to maintain a vacuum seal between said support assembly and said mounting means for all positions of said support assembly.
Claim 7
Dependent Claim
15 words
Apparatus according to claim 1 wherein said rotating means are mounted to said support assembly.
References Cited (Backward Citations)
US2463906A
Cited
US2746420A
Cited
US2819905A
Cited
US3206322A
Cited
US3228794A
Cited
US3381947A
Cited
US3469560A
Cited
US3396696A
Cited
US3568632A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-05-16 | 1975-11-15 | 1976-05-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-05-16 | 1979-11-15 | 1980-05-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-05-16 | 1983-11-15 | 1984-05-16 | $7700.00 | Window Closed / Lapsed |