US3657004A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for producing highly pure gallium arsenide
Assignee: Siemens AG
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Filing: 1970-01-08
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Granted: 1972-04-18
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Expires: 1990-01-08
Abstract
Abstract Method of depositing gallium arsenide upon substrate wafers in a closed reaction system using water as the transport medium. The water together with B203 is placed in a reaction vessel along with gallium arsenide and the wafers to be coated. The ratio of boron oxide to water is 1:10 5.
Inventors
- 👤 Hans Merkel
- 👤 Siegfried Leibenzeder
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 00:15
CPC Classifications
C; C01; C01G; C01G28/00; C01G28/02; C01P; C01P2004/00; C01P2004/80; Y; Y10; Y10S; Y10S148/00; Y10S148/056; Y10S148/065
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
24 words
The method of claim 1, wherein the water is homogeneously installed into the transport system, with the aid of the donor substance boron trioxide.
Claim 2
Dependent Claim
23 words
The method of claim 1, wherein a boron trioxide/water mixture containing from approximately 55 to almost 100 Mole percent boron trioxide is employed.
Claim 3
Dependent Claim
31 words
The method of claim 1, wherein the transport reaction is conducted at a steam pressure of 2 to 3 Torr, which corresponds to a boron trioxide/water weight ratio of 1:10 5.
Claim 4
Independent Claim
60 words
The method of producing highly pure gallium arsenide upon a substrate in a closed transport system, which comprises placing boron trioxide/water, gallium arsenide and the substrate in a closed reaction system, and heating the substrate to 700* C, the gallium arsenide to 775* C and the boron trioxide/water to 725* C, the weight ratio of boron trioxide:water being 1:10 5.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-04-18 | 1975-10-18 | 1976-04-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-04-18 | 1979-10-18 | 1980-04-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-04-18 | 1983-10-18 | 1984-04-18 | $7700.00 | Window Closed / Lapsed |