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US3647935A Expired / Lapsed US ⏱️ 0.0 years remaining

Intermetallic passivation of aluminum metallization

Assignee: Motorola Solutions Inc
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Filing: 1969-12-15
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Granted: 1972-03-07
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Expires: 1989-12-15
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Abstract

Abstract An electrically conductive intermetallic coating which is resistant to corrosion serves as a passivating layer on an aluminum metallization. The preferred intermetallic is AuA12. The intermetallic passivating layer protects the aluminum metallization from chemical attack thereby increasing device lifetime and stability.

Inventors

  • 👤 Elliott M Philofsky
  • 👤 Kim Ritchie

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 23:37
CPC Classifications
H; H10; H10P; H10P95/00; H10P95/50; H10W; H10W74/00; H10W74/10

Claims Analysis

Total Claims: 4
Claim 1
Independent Claim 25 words
A method as disclosed in claim 1 wherein the step of depoSiting said gold is depositing gold to a thickness of 1,000 to 2,000 angstroms.
Claim 2
Dependent Claim 27 words
A method as described in claim 1 wherein the step of heating said gold deposited aluminum metallization is heating to a temperature of 200* to 400* C.
Claim 3
Dependent Claim 46 words
A semiconductor device comprising a semiconductor substrate, an exposed aluminum metallization positioned on said substrate, and a layer of an electrically conductive intermetallic AuA12 on and covering all of said exposed aluminum metallization, said conducting intermetallic being relatively inert to corrosion caused by the chloride ion.
Claim 4
Dependent Claim 21 words
A device as disclosed in claim 4 wherein an insulative layer is interposed between said aluminum metallization and said semiconductor substrate.

References Cited (Backward Citations)

US3436615A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1975-03-07 1975-09-06 1976-03-07 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1979-03-07 1979-09-06 1980-03-07 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1983-03-07 1983-09-06 1984-03-07 $7700.00 Window Closed / Lapsed

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