Specimen stage and holder assembly for electron microscope

Claim 2

In an electron beam apparatus including structure defining a flat reference surface having an opening through which electron beams pass along an optical axis, an improved specimen stage and holder assembly comprising nested stage plates, each having portions in intimate physical contact with and movable on said reference surface along orthogonal axes, means for moving each of said plates, a specimen holder, and means mounting said specimen holder on one of said plates.

Claim 3

Apparatus as claimed in claim 1 wherein said mounting means comprises a carriage mounted on said one plate for rectilinear movement, and means for moving said carriage.

Claim 4

Apparatus as claimed in claim 2 wherein said specimen holder includes a plurality of specimen mounting stations, and wherein said carriage is movable to permit said stations to be aligned on said optical axis in any desired sequence.

Claim 5

Apparatus as claimed in claim 3 wherein said carriage moving means includes means for indicating the selected specimen station aligned on the optical axis.

Claim 6

Apparatus as claimed in claim 2 wherein said specimen holder includes a slit adapted to mount serially related specimens.

Claim 7

Apparatus as claimed in claim 1 wherein said specimen holder includes means for tilting a mounted specimen about said optical axis.

Claim 8

Apparatus as claimed in claim 6 wherein said tilting means comprises a spherical member containing a specimen grid, means mounting said member for universal tilting movement, and means engageable with said member for tilting it.

Claim 9

In an electron beam apparatus including structure defining a flat reference surface having an opening through which electron beams pass along an optical axis, an improved specimen stage and holder assembly comprising a first stage plate slidably mounted on and having portions in intimate physical contact with said reference surface, means guiding said first plate for movement along a first axis, a second stage plate slidably mounted on and having portions in intimate physical contact with said reference surface and movable with said first plate, means guiding said second plate for movement along a second axis transverse to said first axis, means for moving said plates, a specimen holder, and means mounting said holder on one of said plates.

Claim 10

In an electron beam apparatus including structure defining a flat reference surface having an opening through which electron beams pass along an optical axis, an improved specimen stage and holder assembly comprising a first stage plate slidably mounted on and having portions in intimate physical contact with said reference surface, means guiding said first plate for movement along a first axis, a second stage plate slidably mounted on and having portions in intimate physical contact with said reference surface and movable with said first plate, means guiding said second plate for movement along a second axis transverse to said first axis, means for moving said plates, a specimen holder, and means mounting said holder on one of said plates.

Claim 11

Apparatus as claimed in claim 8 wherein said first plate comprises a frame, and wherein said second plate is disposed within said frame on said reference surface.

Claim 12

In an electron beam apparatus including structure defining a flat reference surface have an opening through which electron beams pass along an optical axis, an improved specimen stage and holder assembly comprising a first stage plate slidable on and having portions in intimate physical contact with said reference surface, means guiding said first plate for movement along a first axis, a second stage plate slidable on and having portions in intimate physical contact with said reference surface and movable with said first plate, means guiding said second plate for movement along an axis transverse to said first axis, means for moving said plates, a carriage slidably mounted on said second plate for movement along said second axis, means for moving said carriage, and a specimen holder mounted on said carriage.

Claim 13

In an electron beam apparatus including structure defining a flat reference surface have an opening through which electron beams pass along an optical axis, an improved specimen stage and holder assembly comprising a first stage plate slidable on and having portions in intimate physical contact with said reference surface, means guiding said first plate for movement along a first axis, a second stage plate slidable on and having portions in intimate physical contact with said reference surface and movable with said first plate, means guiding said second plate for movement along an axis transverse to said first axis, means for moving said plates, a carriage slidably mounted on said second plate for movement along said second axis, means for moving said carriage, and a specimen holder mounted on said carriage.

Claim 14

Apparatus as claimed in claim 10 wherein said second plate includes a flat surface parallel to the path of carriage movement, and wherein said specimen holder is slidable on said flat surface.

Claim 15

Apparatus as claimed in claim 11 wherein said specImen holder includes a plurality of specimen mounting stations adapted to be selectively aligned on said optical axis by movement of said carriage.

Claim 16

Apparatus as claimed in claim 11 wherein said specimen holder includes a slit adapted to mount serially related specimens.

Claim 17

Apparatus as claimed in claim 11 wherein said specimen holder includes means for tilting a mounted specimen about said optical axis.

Claim 18

In an electron beam apparatus including structure defining a flat reference surface having an opening through which electron beams pass along an optical axis, an improved specimen stage and holder assembly comprising: a. stage plates movable along orthogonal axes, on said reference surface and having portions in intimate physical contact therewith; b. said holder including: i. a spherical specimen mounting member, ii. structure mounting said spherical member for universal tilting movement, iii. means engageable with said spherical members for imparting universal tilting movement, c. and means engageable with said last-mentioned means for operating the same.

Claim 19

In an electron beam apparatus including structure defining a flat reference surface having an opening through which electron beams pass along an optical axis, an improved specimen stage and holder assembly comprising: a. stage plates movable along orthogonal axes, on said reference surface and having portions in intimate physical contact therewith; b. said holder including: i. a spherical specimen mounting member, ii. structure mounting said spherical member for universal tilting movement, iii. means engageable with said spherical members for imparting universal tilting movement, c. and means engageable with said last-mentioned means for operating the same.

Claim 20

Apparatus as claimed in claim 15 wherein said stage plates are nested one within another and are each movable on said reference surface.

Claim 21

Apparatus as claimed in claim 15 wherein said holder mounting means comprises a carriage slidable on said one plate.