Patent US3641973A successfully refreshed from Google Patents.
US3641973A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vacuum coating apparatus
Assignee: Airco Inc
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Filing: 1970-11-25
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Granted: 1972-02-15
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Expires: 1990-11-25
Abstract
Abstract Vacuum coating apparatus is described wherein substrates to be coated supported on a substrate holder may be inserted into and removed from an isolatable region of the vacuum chamber, which isolatable region may be sealed off by a movable gate, whereby the remaining regions of the vacuum chamber may be maintained under vacuum while inserting and removing the substrate holders.
Inventors
- 👤 Robert L Shrader
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 07:03
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/56; C23C14/564; C23C14/566; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/139
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
270 words
Vacuum coating apparatus comprising, a vacuum chamber, support means within said vacuum chamber for supporting at least one substrate holder therein at a coating position for coating substrates held thereon, said holder comprising a domed, rotatable member having a crank element extending from the topmost surface thereof, said chamber including a pivotable closure having a driven crank arm depending therefrom whereby said substrate holder is adapted to be rotated by operative contact between said crank arms, a vapor source within said vacuum chamber, means for maintaining said vacuum chamber under continuous vacuum, a movable vacuum seal gate within said vacuum chamber, means for moving said gate to a first position wherein the region of said vacuum chamber in which said support means are disposed is vacuum sealed from the regions of said chamber in which said vapor source and said vacuum maintaining means are disposed, thereby permitting access to said support means from outside said vacuum chamber without losing vacuum in the entire chamber, said moving means being operable for moving said gate to a second position wherein all said named regions are in communication with each other and wherein the path between said vapor source and the coating position is unobstructed to allow coating of the substrates, and said moving means being operable to move said gate to a third position wherein all said named regions are in communication with each other, and wherein said gate obstructs the path between said vapor source and the coating position to allow evacuation of both said regions by said vacuum maintaining means while preventing deposition of vapor on substrates during such periods.
Claim 2
Dependent Claim
270 words
Vacuum coating apparatus comprising, a vacuum chamber, support means within said vacuum chamber for supporting at least one substrate holder therein at a coating position for coating substrates held thereon, said holder comprising a domed, rotatable member having a crank element extending from the topmost surface thereof, said chamber including a pivotable closure having a driven crank arm depending therefrom whereby said substrate holder is adapted to be rotated by operative contact between said crank arms, a vapor source within said vacuum chamber, means for maintaining said vacuum chamber under continuous vacuum, a movable vacuum seal gate within said vacuum chamber, means for moving said gate to a first position wherein the region of said vacuum chamber in which said support means are disposed is vacuum sealed from the regions of said chamber in which said vapor source and said vacuum maintaining means are disposed, thereby permitting access to said support means from outside said vacuum chamber without losing vacuum in the entire chamber, said moving means being operable for moving said gate to a second position wherein all said named regions are in communication with each other and wherein the path between said vapor source and the coating position is unobstructed to allow coating of the substrates, and said moving means being operable to move said gate to a third position wherein all said named regions are in communication with each other, and wherein said gate obstructs the path between said vapor source and the coating position to allow evacuation of both said regions by said vacuum maintaining means while preventing deposition of vapor on substrates during such periods.
Claim 3
Dependent Claim
48 words
Vacuum coating apparatus according to claim 1 including substrate heating means positioned on said gate on the side thereof toward the region of said chamber in which said support means are disposed for heating the substrates on the substrate holder when said gate is in said third position.
Claim 4
Dependent Claim
56 words
Vacuum coating apparatus according to claim 2 wherein said gate comprises a generally annular sealing surface, wherein said moving means include a plurality of actuators for moving said gate axially between said second and third positions, and wherein said moving means include a mechanical linkage for moving said gate laterally between said first and third positions.
Claim 5
Dependent Claim
41 words
Apparatus according to claim 1 including a vapor mask for positioning in the vapor flow, and wherein said moving means are operable to move said vapor mask into position in the vapor flow upon moving said gate to said second position.
Claim 6
Dependent Claim
37 words
Vacuum coating apparatus according to claim 2 wherein the direction of movement of said gate between said firsT and third positions is perpendicular to the direction of movement of said gate between said second and third positions.
Claim 7
Dependent Claim
217 words
Vacuum coating apparatus comprising, a vacuum chamber having an upper region and a lower region, support means within said upper region of said vacuum chamber for supporting at least one substrate holder therein at a coating position for coating substrates held thereon, a vapor source within said lower region of said vacuum chamber and directly beneath said coating position, means communicating with said lower region of said vacuum chamber for maintaining said vacuum chamber under continuous vacuum and for evacuating said upper region, a movable vacuum seal gate within said vacuum chamber, means for moving said gate to a first position wherein said upper region of said vacuum chamber is vacuum sealed from said lower region of said vacuum chamber, means for providing access to said upper region of said vacuum chamber with said gate in said first position, said moving means being operable to move said gate vertically to a position between said vapor source and said coating position to prevent passage of vapor from said vapor source to said coating position but to provide communication between said upper and lower regions of said vacuum chamber, said moving means being operable for moving said gate laterally to a position displaced from the path between said vapor source and the coating position to allow coating of substrates.
Claim 8
Dependent Claim
217 words
Vacuum coating apparatus comprising, a vacuum chamber having an upper region and a lower region, support means within said upper region of said vacuum chamber for supporting at least one substrate holder therein at a coating position for coating substrates held thereon, a vapor source within said lower region of said vacuum chamber and directly beneath said coating position, means communicating with said lower region of said vacuum chamber for maintaining said vacuum chamber under continuous vacuum and for evacuating said upper region, a movable vacuum seal gate within said vacuum chamber, means for moving said gate to a first position wherein said upper region of said vacuum chamber is vacuum sealed from said lower region of said vacuum chamber, means for providing access to said upper region of said vacuum chamber with said gate in said first position, said moving means being operable to move said gate vertically to a position between said vapor source and said coating position to prevent passage of vapor from said vapor source to said coating position but to provide communication between said upper and lower regions of said vacuum chamber, said moving means being operable for moving said gate laterally to a position displaced from the path between said vapor source and the coating position to allow coating of substrates.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-02-14 | 1975-08-16 | 1976-02-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-02-14 | 1979-08-16 | 1980-02-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-02-14 | 1983-08-16 | 1984-02-15 | $7700.00 | Window Closed / Lapsed |