Patent US3641402A successfully refreshed from Google Patents.
US3641402A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor device with beta tantalum-gold composite conductor metallurgy
Assignee: International Business Machines Corp
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Filing: 1969-12-30
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Granted: 1972-02-08
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Expires: 1989-12-30
Abstract
Abstract A deposited film of gold is adhered to a layer of silicon dioxide by a deposited film of Beta tantalum. After the gold is deposited on the Beta tantalum, a second film of Beta tantalum is deposited on the gold. This forms a composite sandwich adhering the gold to the silicon dioxide without decreasing the conductivity of the gold and allowing another layer of silicon dioxide to be adhered to the second film of Beta tantalum.
Inventors
- 👤 Martin Revitz
- 👤 Francis E Turene
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 21:57
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/44; H10W20/4403; H10W20/4432; H10W72/00; H10W72/60
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
12 words
The device according to claim 1 in which said substrate is silicon.
Claim 2
Dependent Claim
14 words
The device according to claim 2 in which said insulating layer is silicon dioxide.
Claim 3
Dependent Claim
14 words
The device according to claim 1 in which said insulating layer is silicon dioxide.
Claim 4
Dependent Claim
29 words
The device according to claim 1 in which a thin film of oxide is deposited on said film of Beta tantalum prior to deposition of said film of gold.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-02-07 | 1975-08-09 | 1976-02-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-02-07 | 1979-08-09 | 1980-02-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-02-07 | 1983-08-09 | 1984-02-08 | $7700.00 | Window Closed / Lapsed |