Patent US3630871A successfully refreshed from Google Patents.
US3630871A
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US
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Cathodic sputtering method
Assignee: Arris Technology Inc
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Filing: 1969-06-11
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Granted: 1971-12-28
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Expires: 1989-06-11
Abstract
Abstract A CATHODIC SPUTTERING METHOD FOR DEPOSITING A THIN FILM OF CATHODE MATERIAL ON A SUBSTRATE COMPRISING THE STEPS OF POSITIONING THE SUBSTRATE ADJACENT AN ANODE SURFACE COATED WITH A MATERIAL HAVING PROPERTIES SIMILAR TO THOSE OF THE SUBSTRATE, AND SPUTTERING THE SUBSTRATE AND THE COATING ONTHE ANODE SURFACE. BECAUSE OF THE ANODE COATING, THE ANODE "LOOKS" TO THE CATHODE MUCH LIKE THE SUBSTRATE AND THEREFORE A THIN FILM HAVING UNIFORM ELECTRICAL RESISTANCE IS PRODUCED OVER THE ENTIRE SURFACE OF THE SUBSTRATE.
Inventors
- 👤 Sturger R Wagner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 00:44
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/35; C23C14/06; C23C14/10
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-12-27 | 1975-06-28 | 1975-12-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-12-27 | 1979-06-28 | 1979-12-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-12-27 | 1983-06-28 | 1983-12-28 | $7700.00 | Window Closed / Lapsed |