Patent US3630593A successfully refreshed from Google Patents.
US3630593A
Expired / Lapsed
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Holographically produced image arrays for photolithography
Assignee: AT&T Inc
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Filing: 1970-05-08
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Granted: 1971-12-28
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Expires: 1990-05-08
Abstract
Abstract This disclosure describes the generation of multiple identical images holographically. Wavefronts from a unit pattern and a pinhole array separately illuminated by branched, spatially filtered and collimated laser beams are Fourier-transformed and focused in front of a holographic medium. Illumination of the developed hologram with a laser beam conjugate to the wavefront from one of the pinholes produces a spaced array of real images of the unit pattern. The process is useful in photomask making, or as a way to directly expose photoresist in silicon device manufacture.
Inventors
- 👤 John Lester Bartelt
- 👤 Robert Kyran Curran
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 17:16
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70408; G03H; G03H1/00; G03H1/26; G03H1/0005; G03H2001/0094; G03H1/04; G03H1/0402; G03H2001/0428; G03H2210/00; G03H2210/20; G03H2223/00; G03H2223/12; G03H2227/00; G03H2227/03; G03H2240/00; G03H2240/10; G03H2240/11; Y; Y10; Y10S; Y10S359/00; Y10S359/90; Y10S430/00; Y10S430/146
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
20 words
Method pursuant to claim 1 wherein said unit pattern is a photomask pattern and said photosensitive medium is a photomask.
Claim 2
Dependent Claim
23 words
Method pursuant to claim 1 wherein said unit pattern comprises circuit paths and said photosensitive medium is a photoresist-coated semiconduction device in manufacture.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-12-27 | 1975-06-28 | 1975-12-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-12-27 | 1979-06-28 | 1979-12-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-12-27 | 1983-06-28 | 1983-12-28 | $7700.00 | Window Closed / Lapsed |