Patent US3628012A successfully refreshed from Google Patents.
US3628012A
Expired / Lapsed
US
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Scanning stereoscopic electron microscope
Assignee: Individual
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Filing: 1969-04-03
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Granted: 1971-12-14
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Expires: 1989-04-03
Abstract
Abstract A charged particle beam apparatus provided with an adjusting device to change an impinging angle of charged particle beams to be irradiated onto a specimen, thereby enabling a stereoimage thereof without tilting the same.
Inventors
- 👤 Graham Stuart Plows
- 👤 William Charles Nixon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 13:05
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/252; H01J37/26; H01J37/28
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
53 words
A scanning-type electron microscope according to claim 1 wherein said angle varying means comprises an aperture plate having means therein defining one passage-hole, and means mounting said aperture plate for alternate movement in a direction Substantially transverse to the electron beam to effect selection of only a desired portion of said electron beam.
Claim 2
Dependent Claim
56 words
A scanning-type electron microscope according to claim 1 wherein said angle v arying means comprises an aperture plate having means therein defining at least two passage-holes a sutter plate having means therein defining one passage-hole, and means mounting said shutter plate for alternate movement on said aperture plate to alternately open and close said two passage-holes
Claim 3
Dependent Claim
68 words
A scanning-type electron microscope accoridn to claim 1 wherein said angle varying means comprises an aperture plate having means there in defining at least two passage-holes, an electrode connectabl eto a source of electrical potential for dividing the electron beam into two beam portion, and deflectn means for deflecting one of the fivided electron beam portions to prevent same f from apssing through one of said two passage-holes
Claim 4
Dependent Claim
102 words
A scanning-type electron mixroscope accoridnto claim 1 wherein said angle vrying means comprises deflecting means disposed at the image plane of said focusing means for alternately deflecting the electrone beam in two directions towards said focusing means 6. A scanning-type electron microscope according to claim 1; wherein said angle varying means comprises an aperture plae having means therein defining one passage hole disposed below an image plane of said focusing means, and deflecting means disposed downstream from s aid aperture plate having means therein defining one passge-hole for alternately deflecting the electron beam passing cherethrough in two directions towards said focusing means.
Claim 5
Independent Claim
121 words
A method for obtaining a stereoscopic image of a specimen comprising: providing a specimen to be observed and placing same in an observation plane; emitting an electron beam and directing same towards the specimmen; focusing theelectron beam on the specimen located in saiobservation plane; sacnning the focused electron beam across the specimen in a predeterined scanning pattern causing the specimen to emit secondary electrons; selectively varying theangel at which the focused electron beam i mpinges upon the specimen while same is located in said observation plane to accordingly vary the secondary electron emission from the specimen; detecting secondary electrons emitted from the specimen and providing a corresponding detecting signal; and providing a stereoscopic visula image of the specimen in responsg signal.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-12-13 | 1975-06-14 | 1975-12-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-12-13 | 1979-06-14 | 1979-12-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-12-13 | 1983-06-14 | 1983-12-14 | $7700.00 | Window Closed / Lapsed |