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US3628009A
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Scanning-type sputtering mass spectrometer
Assignee: Hitachi Ltd
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Filing: 1970-07-09
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Granted: 1971-12-14
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Expires: 1990-07-09
Abstract
Abstract A scanning-type sputtering mass spectrometer comprising a primary ion-scanning unit including electrostatic-deflecting means and a secondary ion-analyzing unit including electrostaticaccelerating means, elecromagnetic-deflecting means and an ion collector. The accelerating voltage or the deflecting magnetic flux density is controlled in magnitude in synchronism with the scanning of the primary ion beam so as to let only ions of a particular mass-to-change ratio into the ion collector, irrespective of the displacement of the subject point of the secondary ion-analyzing unit.
Inventors
- 👤 Hiroshi Doi
- 👤 Hifumi Tamura
- 👤 Itiro Omura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 23:06
CPC Classifications
H; H01; H01J; H01J49/00; H01J49/26; H01J49/28; H01J49/30; H01J37/00; H01J37/252; H01J37/256
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
41 words
A sputtering mass spectrometer according to claim 1, wherein said scanning means is an electrostatic deflecting device, and said compensating means varies one of the accelerating voltage and the exciting current in proportion to the voltage energizing said electrostatic deflecting device.
Claim 2
Dependent Claim
25 words
A sputtering mass spectrometer according to claim 1, wherein said compensating means varies the accelerating voltage synchronously with the scanning of said primary ion beam.
Claim 3
Dependent Claim
25 words
A sputtering mass spectrometer according to claim 1, wherein said compensating means varies the exciting current synchronously with the scanning of said primary ion beam.
Claim 4
Dependent Claim
27 words
A sputtering mass spectrometer apparatus according to claim 1, further comprising means for displaying the image of secondary ions through the output voltage of said ion collector.
References Cited (Backward Citations)
US3517191A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-12-13 | 1975-06-14 | 1975-12-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-12-13 | 1979-06-14 | 1979-12-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-12-13 | 1983-06-14 | 1983-12-14 | $7700.00 | Window Closed / Lapsed |