US3601666A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Titanium tungsten-gold contacts for semiconductor devices
Assignee: Texas Instruments Inc
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Filing: 1969-08-21
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Granted: 1971-08-24
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Expires: 1989-08-21
Abstract
Abstract A trimetal ohmic contact system comprising titanium covered by tungsten and then gold is provided for semiconductors, especially for silicon devices. For best results it is essential to deposit the titanium by evaporation, since it is very difficult to obtain good ohmic contact with a sputtered film.
Inventors
- 👤 Hayden M Leedy
- 👤 Neal J Tolar
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 01:31
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/80; H10D62/83; H10D64/00; H10D64/60; H10D64/62; H10P; H10P95/00; H10W; H10W20/00; H10W20/40
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
12 words
A system as defined by claim 1 wherein said semiconductor is silicon.
Claim 2
Dependent Claim
70 words
A semiconductor device comprising a semiconductor body having at least one PN junction therein; an insulating layer covering a surface of said body, said layer having an opening therethrough; a film of titanium in contact with said semiconductor at the location exposed by said opening; a film of tungsten covering in direct contact with said titanium film; and a film of gold covering in direct contact with said tungsten film.
Claim 3
Dependent Claim
12 words
A device as defined by claim 3 wherein the semiconductor is silicon.
Claim 4
Dependent Claim
72 words
An integrated semiconductor circuit comprising: a semiconductor body having a plurality of PN junctions therein; an insulating layer covering a surface of said body, said layer having a plurality of openings therein; a film of titanium interconnecting said semiconductor surface at two locations exposed by said openings; a film of tungsten covering in direct contact with said titanium film; and a film of gold covering in direct contact with said tungsten film.
Claim 5
Dependent Claim
12 words
A circuit as defined by claim 5 wherein said semiconductor is silicon.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-08-23 | 1975-02-22 | 1975-08-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-08-23 | 1979-02-22 | 1979-08-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-08-23 | 1983-02-22 | 1983-08-24 | $7700.00 | Window Closed / Lapsed |