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US3601577A
Expired / Lapsed
US
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Method and apparatus for viewing the impact spot of a charge carrier beam
Assignee: Messer Griesheim GmbH
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Filing: 1970-01-20
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Granted: 1971-08-24
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Expires: 1990-01-20
Abstract
Abstract In equipment using a beam of charged particles for machining a workpiece, the size and/or shape of the beam''s impact spot is checked by placing a sharply defined edge to intercept energy radiated from the impact spot so that the radiation casts a shadow on a detection device, which is provided by a fluorescent screen of a photoelectric detector or by a combination of them.
Inventors
- 👤 Edgar Meyer
- 👤 Joachim Geissler
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 07:19
CPC Classifications
B; B23; B23K; B23K15/00; B23K15/0013; H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/147; H01J37/30; H01J37/3002; H01J37/3005; H01J37/304
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
79 words
A device for monitoring the focused state of a beam of charged particles at the impact spot on a workpiece, comprising means for detecting energy radiated from the impact spot of the beam of charged particles, and a diaphragm having a sharply defined edge positioned between the impact spot and the detecting means to cast a shadow on the detecting means with the sharpness of the shadow representative of the focused state of the beam at the impact spot.
Claim 2
Independent Claim
79 words
A device for monitoring the focused state of a beam of charged particles at the impact spot on a workpiece, comprising means for detecting energy radiated from the impact spot of the beam of charged particles, and a diaphragm having a sharply defined edge positioned between the impact spot and the detecting means to cast a shadow on the detecting means with the sharpness of the shadow representative of the focused state of the beam at the impact spot.
Claim 3
Dependent Claim
19 words
The device as recited in claim 1 wherein the diaphragm includes a knife edge to cast a linear shadow.
Claim 4
Dependent Claim
74 words
The device as recited in claim 1 wherein the diaphragm is formed of a first apertured plate and a second disc spaced from the plate along a path between the impact spot and the detecting means, with the disc selectively sized with respect to the aperture in the plate to prevent radiation from the impact spot from reaching the detection means whenever the size of the impact spot is smaller than a predetermined value.
Claim 5
Dependent Claim
15 words
The device as recited in claim 3 wherein the aperture and the disc are circular.
Claim 6
Dependent Claim
17 words
The device as recited in claim 3 wherein distance between the disc and the aperture is adjustable.
Claim 7
Dependent Claim
53 words
The device as recited in claim 3 wherein the detecting means comprises a fluorescent screen and a photoelectric detector arranged adjacent the screen to sense the light emission thereof in the area where radiation is received from the impact spot whenever the size of the impact spot is larger than said predetermined value.
Claim 8
Dependent Claim
56 words
The device as recited in claim 3 and further including means for periodically varying the focusing condition of the beam, means for producing an output signal from the detection means in dependence on the radiation received thereon, and means for stopping the variation of the focusing condition upon occurrence of a minimum of the output signal.
Claim 9
Dependent Claim
15 words
The device as recited in claim 1 wherein the detecting means comprises a fluorescent screen.
Claim 10
Dependent Claim
24 words
The device as recited in claim 1 and further including means for deflecting charged particle radiation from the impact spot onto the detecting means.
Claim 11
Dependent Claim
17 words
The device as recited in claim 1 wherein the detection means are responsive to charged particle radiation.
Claim 12
Independent Claim
88 words
A method of monitoring the focused state of a beam of charged particles at its impact spot on a workpiece, cOmprising the steps of positioning an impact spot radiation sensitive detection device at a location to receive energy radiated from the impact spot, selectively intercepting the flow of said energy to said detection device with a sharply defined edge to cast a shadow image on the radiation detection device with the sharpness of the shadow being representative of the focusing condition of the beam at the impact spot.
Claim 13
Independent Claim
88 words
A method of monitoring the focused state of a beam of charged particles at its impact spot on a workpiece, cOmprising the steps of positioning an impact spot radiation sensitive detection device at a location to receive energy radiated from the impact spot, selectively intercepting the flow of said energy to said detection device with a sharply defined edge to cast a shadow image on the radiation detection device with the sharpness of the shadow being representative of the focusing condition of the beam at the impact spot.
Claim 14
Dependent Claim
59 words
The method as recited in claim 11 and further including the steps of adjusting the interception of the radiation to cast a normally dark shadow image for a focused beam at the impact spot, and sensing the brightening of the dark shadow image upon a defocusing of the beam at the impact spot and producing a signal representative thereof.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-08-23 | 1975-02-22 | 1975-08-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-08-23 | 1979-02-22 | 1979-08-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-08-23 | 1983-02-22 | 1983-08-24 | $7700.00 | Window Closed / Lapsed |