Patent US3599321A successfully refreshed from Google Patents.
US3599321A
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Inverted space charge limited triode
Assignee: Xerox Corp
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Filing: 1969-08-13
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Granted: 1971-08-17
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Expires: 1989-08-13
Abstract
Abstract This disclosure is directed toward a method of fabricating an inverted space charge limited solid-state triode and to the device resulting therefrom. The method, in general, comprises depositing a continuous film of conductive metal to act as a gate, oxidizing the exposed side of the gate metal to form an insulating layer, depositing a semiconductive layer on the top of the insulated gate, depositing a pinhole cathode grid on the semiconductor, oxidizing the exposed side of the cathode grid to form an insulating coating, depositing more semiconductor over the cathode insulation and depositing a continuous film of conductive metal over the semiconductor to act as a collector.
Inventors
- 👤 Fred William Schmidlin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 14:50
CPC Classifications
H; H10; H10D; H10D99/00; H10D48/00; H10D48/30; H10D48/32; H10D48/36; H10P; H10P14/00; H10P14/20; H10P14/22; H10P14/29; H10P14/2901; H10P14/2922; H10P14/32; H10P14/3202; H10P14/3238; H10P14/34; H10P14/3402; H10P14/3424
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
37 words
The method of claim 1 wherein oxidizing the exposed surfaces of said metal of said cathode grid is controlled to produce an oxide layer on the cathode grid at least as thick as the effective gate-cathode separation.
Claim 2
Dependent Claim
22 words
The method of claim 1 wherein said electrically conductive metal which is deposited is aluminum and wherein said semiconductor is cadmium sulfide.
Claim 3
Dependent Claim
22 words
The method of claim 2 wherein said electrically conductive metal which is deposited is aluminum and wherein said semiconductor is cadmium sulfide.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-08-16 | 1975-02-15 | 1975-08-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-08-16 | 1979-02-15 | 1979-08-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-08-16 | 1983-02-15 | 1983-08-17 | $7700.00 | Window Closed / Lapsed |