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US3598957A
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Vacuum deposition apparatus
Assignee: Toshiba Corp
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Filing: 1969-09-10
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Granted: 1971-08-10
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Expires: 1989-09-10
Abstract
Abstract A vacuum deposition apparatus comprising a rodlike vapor deposition source vertically mounted substantially in the center of a vacuum vessel, a cylindrical member inside the vacuum vessel and surrounding the vapor deposition source which is located substantially at the central axis of the cylindrical member, a substrate being mounted on the inner surface of the cylindrical member, a shutter for selectively shutting off a deposition metal supplied from said rodlike vapor deposition source from being deposited on the substrate, and a coil for generating a magnetic field positioned outside said cylindrical member. A heater is optionally included to heat the substrate.
Inventors
- 👤 Nobuaki Yasuda
- 👤 Iwao Higashinakagawa
- 👤 Hiroaki Okamoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 12:46
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
33 words
Apparatus according to claim 1 further comprising a heater which is attached on the outer surface of said cylindrical member for heating said substrate mounted on the inner surface of said cylindrical member.
Claim 2
Dependent Claim
18 words
Apparatus according to claim 1 wherein said coil is supported on said base and outside said vacuum vessel.
Claim 3
Dependent Claim
18 words
Apparatus according to claim 1 wHerein said coil is supported on said base and inside said vacuum vessel.
Claim 4
Dependent Claim
22 words
Apparatus according to claim 1 wherein said vapor deposition material is in the form of wire wound about said rodlike heater element.
Claim 5
Dependent Claim
23 words
Apparatus according to claim 5 wherein said vapor deposition source further includes a high-melting-point heat-resistant wire wound about said wire-shaped vapor deposition material.
Claim 6
Dependent Claim
23 words
Apparatus according to claim 1 wherein said vapor deposition material is in the form of a ribbon wound about said rodlike heater element.
Claim 7
Dependent Claim
23 words
Apparatus according to claim 7 wherein said vapor deposition source further includes a high-melting-point heat-resistant wire wound about said ribbon-shaped vapor deposition material.
Claim 8
Dependent Claim
22 words
Apparatus according to claim 1 wherein said vapor deposition material is in the form of a cylinder surrounding said rodlike heater element.
Claim 9
Dependent Claim
23 words
Apparatus according to claim 9 wherein said vapor deposition source further includes a high-melting-point heat-resistant wire wound about said cylindrical vapor deposition material.
Claim 10
Dependent Claim
18 words
Apparatus according to claim 1 wherein said vacuum vessel includes a bell jar mounted on said base member.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-08-09 | 1975-02-08 | 1975-08-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-08-09 | 1979-02-08 | 1979-08-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-08-09 | 1983-02-08 | 1983-08-10 | $7700.00 | Window Closed / Lapsed |