Patent US3595775A successfully refreshed from Google Patents.
US3595775A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sputtering apparatus with sealed cathode-shield chamber
Assignee: RTX Corp
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Filing: 1969-05-15
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Granted: 1971-07-27
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Expires: 1989-05-15
Abstract
Abstract FILMS OF MATERIAL ARE DEPOSITED ON A SUBSTRATE AT HIGH RATES BY SPUTTERING IN WHICH A TARGET IS BOMBARDED BY IONS IN A LOW PRESSURE GLOW DISCHARGE IN THE PRESENCE OF A MAGNETIC FIELD. A VERY LOW PRESSURE IS PROVIDED BY A VACUUM PUMP IN A SEALED CHAMBER BETWEEN THE CATHODE AND THE GROUND SHIELD TO PREVENT ARCING AT HIGH POWER DENSITIES. ATMOSPHERIC PRESSURE MAY ALSO BE ADMITTED TO THE SEALED CHAMBER.
Inventors
- 👤 Daniel H Grantham
- 👤 Daniel J Quinn
- 👤 Edouard L Paradis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 11:53
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/35; H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3402
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-07-26 | 1975-01-25 | 1975-07-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-07-26 | 1979-01-25 | 1979-07-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-07-26 | 1983-01-25 | 1983-07-27 | $7700.00 | Window Closed / Lapsed |