Patent US3594295A successfully refreshed from Google Patents.
US3594295A
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US
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Rf sputtering of insulator materials
Assignee: PHYSICS TECHNOLOGY LAB Inc
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Filing: 1966-09-19
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Granted: 1971-07-20
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Expires: 1986-09-19
Abstract
Abstract METHOD AND APPARATUS FOR SPUTTERING ELECTRICALLY NONCONDUCTIVE MATERIAL WHEREIN POTENTIALS OF OPPOSITE POLARITIES ARE APPLIED TO A TARGET OF NONOCONDUCTIVE MATERIAL WHICH POLARITIES ARE ALTERNATED AT (RF) RADIO FREQUENCIES. THE SPUTTERING DISCHARGE MAY ALSO BE SUPPORTED BY RF POTENTIALS.
Inventors
- 👤 Benjamin B Meckel
- 👤 Bernd H Richelmann
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 09:04
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3471; C23C14/35; C23C14/354; C23C14/358; H; H01; H01J; H01J37/00; H01J37/32; H01J37/34
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-07-19 | 1975-01-18 | 1975-07-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-07-19 | 1979-01-18 | 1979-07-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-07-19 | 1983-01-18 | 1983-07-20 | $7700.00 | Window Closed / Lapsed |