Patent US3594227A successfully refreshed from Google Patents.
US3594227A
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US
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Method for treating semiconductor slices with gases
Assignee: AT&T Inc
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Filing: 1968-07-12
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Granted: 1971-07-20
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Expires: 1988-07-12
Abstract
Abstract PROCESS FOR DEPOSITION OF EPITAXIAL AND DIELECTRIC FILMS IS DISCLOSED. MOLYBDENUM DISCS FOR HOLDING SEMICONDUCTOR SILCES ARE MOUNTED FOR ROTATIONAL MOVEMENT IN A NEARVERTICAL PLANE AND FOR TRANSLATION ALONG A LOCUS OF POINTS SUBSTANTIALLY EQUIDISTANT FROM A HEAT SOURCE. THE DISCS IN ONE EMBODIMENT ARE RESTED AGAINST THE INCLINED SIDES OF A ROTATING FRUSTOCONICAL HOUSING WITH THEIR EDGES IN CONTACT WITH A HORIZONTAL TRACK. A DEPOSITION CHAMBER ENVELOPING THE APPARATUS PROVIDES DOWNWARD GAS FLOW. OUTSIDE RF COILS ENCIRCLE THE CHAMBER.
Inventors
- 👤 Donald R Oswald
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 07:39
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/54; C23C16/458; C23C16/4582; C23C16/4587; C23C16/4588
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-07-19 | 1975-01-18 | 1975-07-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-07-19 | 1979-01-18 | 1979-07-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-07-19 | 1983-01-18 | 1983-07-20 | $7700.00 | Window Closed / Lapsed |