Patent US3591479A successfully refreshed from Google Patents.
US3591479A
Expired / Lapsed
US
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Sputtering process for preparing stable thin film resistors
Assignee: International Business Machines Corp
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Filing: 1969-05-08
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Granted: 1971-07-06
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Expires: 1989-05-08
Abstract
Abstract THIN FILM RESISTORS WHICH ARE STABLE TO THERMAL AND ELECTRICAL STRESS ARE PREPARED. A METAL ALLOY IS DEPOSITED ONTO A SUBSTRATE IN A SPUTTERING ATMOSPHERE COMPRISED OF A PRE-DETERMINED MIXTURE OF ARGON AND OXYGEN. A DC BIAS POTENTIAL IN A RANGE OF -70 TO -250 VOLTS IS APPLIED TO THE SUBSTRATE DURING THE SPUTTERING OPERATION.
Inventors
- 👤 Emanuel Stern
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 21:39
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01C; H01C17/00; H01C17/06; H01C17/075; H01C17/12; H01C7/00; H01C7/06
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-07-05 | 1975-01-04 | 1975-07-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-07-05 | 1979-01-04 | 1979-07-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-07-05 | 1983-01-04 | 1983-07-06 | $7700.00 | Window Closed / Lapsed |