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US3589939A Expired / Lapsed US ⏱️ 0.0 years remaining

Method of making a semiconductor device

Assignee: Hitachi Ltd
•
Filing: 1967-10-16
•
Granted: 1971-06-29
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Expires: 1987-10-16
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Abstract

Abstract A METHOD OF MAKING A STABILIZED SEMICONDUCTOR DEVICE, WHEREIN A SEMICONDUCTOR SUBSTRATE COVERED WITH AN INSULATING FILM SUCH AS A SILICON OXIDE FILM IS HEATED TO A TEMPERATURE NOT BREAKING THE COMPONENTS THEREOF AND AN ELECTRODE METAL E.G. ALUMINUM, ENDOWED WITH A PREDETERMINED ELECTRIC POTENTIAL WITH RESPECT TO THE SUBSTRATE, IS EVAPORATED TO DEPOSIT AN ELECTRODE METAL LAYER ON THE SURFACE OF THE FILM.

Inventors

  • 👤 Minoru Ono
  • 👤 Yoshio Tanaka
  • 👤 Seiichi Iwamatsu

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-27 04:47
CPC Classifications
H; H10; H10W; H10W74/00; H10W74/40; H10W74/43; H10D; H10D99/00; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6302; H10P14/6304; H10P14/6306; H10P14/6308; H10P14/6309; H10P14/6322; H10P95/00; Y; Y10; Y10S; Y10S438/00; Y10S438/91

Claims Analysis

Total Claims: 0
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References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1974-06-28 1974-12-28 1975-06-29 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1978-06-28 1978-12-28 1979-06-29 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1982-06-28 1982-12-28 1983-06-29 $7700.00 Window Closed / Lapsed

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