Patent US3589936A successfully refreshed from Google Patents.
US3589936A
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Heteroepitaxial growth of germanium on sapphire
Assignee: Airco Inc
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Filing: 1969-08-04
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Granted: 1971-06-29
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Expires: 1989-08-04
Abstract
Abstract SINGLE CRYSTAL FILMS OF GERMANIUM ARE DEPOSITED ON SAPPHIRE BY CHEMICAL VAPOR TRANSPORT, USING A DISPROPORTIONATION REACTION INVOLVING WATER VAPOR AND A TECHNIQUE IN WHICH THE SOURCE AND SUBSTRATE ARE CLOSELY SPACED. THE HETEROEPITAXIAL PROCESS IS SENSITIVE TO THE SUBSTRATE ORIENTATION, THE SUBSTRATE TEMPERATURE, AND ALSO TO THE IMPURITY LEVEL IN THE SOURCE MATERIAL. MONOCRYSTALLINE AND HIGHLY ORIENTED FILMS OF GERMANIUM ON SAPPHIRE HAVE BEEN PRODUCED THROUGH THIS PROCESS. THE FILMS ARE USEFUL IN THE PREPARATION OF ELECTRONIC DEVICES.
Inventors
- 👤 Ralph F Tramposch
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 18:29
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/80; H10D62/82; H10P; H10P14/00; H10P14/20; H10P14/29; H10P14/2901; H10P14/2921; H10P14/2924; H10P14/2925; H10P14/2926; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; H10P14/3438; H10P14/3441; H10P14/3442; Y; Y10; Y10S; Y10S148/00; Y10S148/052; Y10S148/115; Y10S148/15; Y10S438/00; Y10S438/967
Claims Analysis
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References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-06-28 | 1974-12-28 | 1975-06-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-06-28 | 1978-12-28 | 1979-06-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-06-28 | 1982-12-28 | 1983-06-29 | $7700.00 | Window Closed / Lapsed |