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US3585382A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Stereo-scanning electron microscope
Assignee: Jeol Ltd
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Filing: 1969-05-26
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Granted: 1971-06-15
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Expires: 1989-05-26
Abstract
Abstract A stereo-scanning electron microscope for scanning a specimen surface with an electron beam by liberating electrons from the specimen which are detected and an image formed on a cathode ray tube. The axis of the electron beam is directionally switched to change the incidence angle of the beam so that images corresponding to two incidence angles are displayed on two cathode ray tubes and a three dimensional image is obtained by observing the two images.
Inventors
- 👤 Tadao Suganuma
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 16:09
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/26; H01J37/28; H01J37/02; H01J37/04; H01J37/147; H01J37/1478
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
177 words
In a scanning electron microscope having an electron beam source, a condensing lens system for focusing said electron beam upon a specimen, means for detecting the electroN beam liberated from the specimen and means for scanning the specimen with said beam, the improvement comprising: A. a switching deflection means for selecting one of two angles of incidence of the beam on the specimen, the switching deflection means being connected to the scanning means to trigger the deflection means synchronously with each scan frame, said switching deflecting means including a variable gain amplifier for selecting different convergence angles being the difference between the said angles of incidence, B. a pair of cathode ray tubes for displaying an image of said specimen, each tube connected to said detector and to said switching deflection means, one tube displaying an image irradiated by the beam at first angle of incidence and the second tube displaying an image irradiated by the beam at a second angle of incidence whereby simultaneous viewing of both tubes presents a stereo image of the scanned specimen.
Claim 2
Dependent Claim
177 words
In a scanning electron microscope having an electron beam source, a condensing lens system for focusing said electron beam upon a specimen, means for detecting the electroN beam liberated from the specimen and means for scanning the specimen with said beam, the improvement comprising: A. a switching deflection means for selecting one of two angles of incidence of the beam on the specimen, the switching deflection means being connected to the scanning means to trigger the deflection means synchronously with each scan frame, said switching deflecting means including a variable gain amplifier for selecting different convergence angles being the difference between the said angles of incidence, B. a pair of cathode ray tubes for displaying an image of said specimen, each tube connected to said detector and to said switching deflection means, one tube displaying an image irradiated by the beam at first angle of incidence and the second tube displaying an image irradiated by the beam at a second angle of incidence whereby simultaneous viewing of both tubes presents a stereo image of the scanned specimen.
Claim 3
Dependent Claim
193 words
In a scanning electron microscope having an electron beam source, a condensing lens system for focusing the beam on a specimen surface, means for scanning the specimen surface, and means for detecting the beam liberated from the surface of the specimen, the improvement comprising: A. a switching deflection means for selecting one of two angles of incidence of the beam upon the specimen surface, the deflection means being connected to said scanning means to trigger the deflection means synchronously with each scan frame, said switching deflecting means including a variable gain amplifier for selecting different convergence angles being the difference between the said angles of incidence, B. a short persistance display screen connected to the detector for displaying the detected image, and C. a shutter mechanism positioned in front of the display screen and having two viewing holes and means for alternatively opening and closing the holes, said shutter mechanism being connected to the switching deflection means to open one viewing hole when the electron beam has a first incident angle and to open the second viewing hole and close the first viewing hole when the electron beam has a second incident angle.
Claim 4
Dependent Claim
193 words
In a scanning electron microscope having an electron beam source, a condensing lens system for focusing the beam on a specimen surface, means for scanning the specimen surface, and means for detecting the beam liberated from the surface of the specimen, the improvement comprising: A. a switching deflection means for selecting one of two angles of incidence of the beam upon the specimen surface, the deflection means being connected to said scanning means to trigger the deflection means synchronously with each scan frame, said switching deflecting means including a variable gain amplifier for selecting different convergence angles being the difference between the said angles of incidence, B. a short persistance display screen connected to the detector for displaying the detected image, and C. a shutter mechanism positioned in front of the display screen and having two viewing holes and means for alternatively opening and closing the holes, said shutter mechanism being connected to the switching deflection means to open one viewing hole when the electron beam has a first incident angle and to open the second viewing hole and close the first viewing hole when the electron beam has a second incident angle.
Claim 5
Dependent Claim
146 words
In a scanning electron microscope having an electron beam source, a condensing lens system for focusing said electron beam upon a specimen, means for detecting the electron beam liberated from the specimen and means for scanning the specimen with said beam, the improvement comprising: A. a switching deflection means for selecting one of two angles of incidence of the beam on the specimen, the switching deflection means being connected to the scanning means to trigger the deflection means synchronously with each scan frame, said switching deflecting means including a variable gain amplifier for selecting different convergence angles being the difference between the said angles of incidence, B. means for detecting electrons liberated from the specimen surface, display means connected to the detector means and having a deflection system connected to the switching deflecting means to synchronize the display device with the scanning of the electrode beam.
Claim 6
Dependent Claim
146 words
In a scanning electron microscope having an electron beam source, a condensing lens system for focusing said electron beam upon a specimen, means for detecting the electron beam liberated from the specimen and means for scanning the specimen with said beam, the improvement comprising: A. a switching deflection means for selecting one of two angles of incidence of the beam on the specimen, the switching deflection means being connected to the scanning means to trigger the deflection means synchronously with each scan frame, said switching deflecting means including a variable gain amplifier for selecting different convergence angles being the difference between the said angles of incidence, B. means for detecting electrons liberated from the specimen surface, display means connected to the detector means and having a deflection system connected to the switching deflecting means to synchronize the display device with the scanning of the electrode beam.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-06-14 | 1974-12-14 | 1975-06-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-06-14 | 1978-12-14 | 1979-06-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-06-14 | 1982-12-14 | 1983-06-15 | $7700.00 | Window Closed / Lapsed |