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US3583361A
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Ion beam deposition system
Assignee: United States Atomic Energy Commission
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Filing: 1969-12-18
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Granted: 1971-06-08
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Expires: 1989-12-18
Abstract
Abstract An ion-beam deposition system including means for providing atoms of depositant material to an ionization region, first and second means for injecting electrons into the ionization region to ionize said depositant atoms, means for periodically and individually energizing the first and second injecting means, and means for extracting and accelerating ions from the ionization region to a substrate.
Inventors
- 👤 Arthur Laudel Jr
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 22:10
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/221; H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; Y; Y10; Y10S; Y10S101/00; Y10S101/37; Y10S148/00; Y10S148/006; Y10S148/045; Y10S148/169
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
20 words
The system of claim 1, wherein said first and second means are positioned at spaced-apart locations about said ionization region.
Claim 2
Dependent Claim
15 words
The system of claim 1, wherein said first and second means are electron emissive cathodes.
Claim 3
Dependent Claim
15 words
The system of claim 1 wherein said deposition atom providing means is an evaporation source.
Claim 4
Dependent Claim
14 words
The system of claim 1, including means for forming said ionS into a beam.
Claim 5
Dependent Claim
18 words
The system of claim 1 wherein part or all of said deposition atom providing means is a gas.
Claim 6
Dependent Claim
14 words
The system of claim 1, in combination with charge neutralization means at the substrate.
Claim 7
Dependent Claim
21 words
The system of claim 1 including means for producing a magnetic field for improving ionization efficiency by increasing electron path length.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-06-07 | 1974-12-07 | 1975-06-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-06-07 | 1978-12-07 | 1979-06-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-06-07 | 1982-12-07 | 1983-06-08 | $7700.00 | Window Closed / Lapsed |