Seed pulling apparatus having diagonal feed and gas doping

Abstract

Abstract A MEANS AND METHOD OF PRODUCING A LARGE DIAMETER SINGLE CRYSTAL ROD OF SEMI-CONDUCTOR MATERIAL BY THE "SEED-PULLING" METHOD COMPRISING A HERMETICALLY-SEALED CHAMBER WITH MEANS FOR INTRODUCING A BAR OF POLY CRYSTAL MATERIAL THEREIN AT AN ANGLE TO THE VERTICAL SO THAT A GENERALLY CONICAL INDUCTION HEATING COIL MAY BE PLACED ABOUT THE BAR END WITHIN THE CHAMBER TO HEAT IT TO A MOLTEN STATE; A ROTATING FUNNEL-SHAPED RECEPTACLE LOCATED BENEATH THE BAR END FOR RECEIVING THE MELTED MATERIAL FLOWING THEREFROM THROUGH A SPACE BETWEEN THE HEATING COILS; ANOTHER CONICAL HEATING COIL FOR MAINTAINING THE MELTED MATERIAL IN THE RECEPTACLE IN A MOLTEN STATE SO THAT A SINGLE CRYSTAL SEED MAY BE INSERTED INTO THE MELT TO PULL A SINGLE CRYSTAL ROD THEREFROM. BY FEEDING THE POLY CRYSTAL MATERAIL TO THE MELT AT A PREDETERMINED RATE WHILE THE ROTATING SINGLE CRYSTAL SEED IS BEING RETRACTED AT A PREDETERMINED RATE A SINGLE CRYSTAL ROD OF ANY DESIRED DIAMETER MAY BE PRODUCED, WHILE REQUIRING LESS HEAT IMPUT FOR PRODUCING AND MAINTAINING A MELT THAN IN PRIOR DEVICES OF THIS TYPE BY VIRTUE OF THE ARRANGEMENT OF THE HEATING COILS.

Inventors

• 👤 Emil R Capita

Bibliographic Details