Cvd process for producing tungsten carbide and article of manufacture

Abstract

Abstract DISCLOSED IS A PROCESS FOR DEPOSITING A METAL CARBIDE IN THE FORM X2C WHERE X IS TAKEN FROM THE GROUP CONSISTING OF TUNGSTEN, MOLYBDENUM AND CHROMIUM BY HEATING A SUBSTRATE TO A TEMPERATURE BETWEEN ABOUT 400*C. AND ABOUT 1300*C. AND PASSING A REACTANT STREAM COMPRISING A HALIDE OF THE METAL AND CARBON MONOXIDE AT ABOUT ATMOSPHERIC PRESSURE, OR GREATER, OVER THE SUBSTRATE. THE ADDITION OF HYDROGEN TO THE REACTANTS RESULTS IN A COHERENT MASS OF THE CARBIDE. A COHERENT LAYER OF THE CARBIDE MAY BE ADHERENTLY DEPOSITED ON A SUBSTRATE SUCH AS STEEL BY FIRST PASSING A REACTANT STREAM COMPRISING A HALIDE OF THE METAL X AND HYDROGEN AS A REDUCING AGENT OVER THE HEATED SUBSTRATE TO DEPOSIT A THIN LAYER OF THE METAL X, THEN ADDING THE CARBON MONOXIDE TO THE REACTANT STREAM TO PRODUCE THE METAL CARBIDE. THE HALIDE OF THE METAL X IS PREFERABLY A HEXAFLUORIDE OF THE METAL X AND THE CARBON MONOXIDE IS PREFERABLY PROVIDED BY THE CARBONYL OF THE METAL X. D R A W I N G

Inventors

• 👤 Donald A Tarver

Bibliographic Details