Patent US3566166A successfully refreshed from Google Patents.
US3566166A
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Mechanical resonator for use in an integrated semiconductor circuit
Assignee: Telefunken Patentverwertungs GmbH
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Filing: 1968-05-27
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Granted: 1971-02-23
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Expires: 1988-05-27
Abstract
Abstract A mechanical resonator for use in an integrated semiconductor circuit. Such resonator is formed by that portion of a circuit element which extends freely beyond a circuit block to which the circuit element is firmly connected. A further aspect of the invention relates to the method of producing such a resonator.
Inventors
- 👤 Manfred Borner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 22:34
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/46; H03H9/48; H03H9/50; H03H9/02; H03H9/02244; H03H9/02259; H03H9/24; H03H9/2405; H03H9/2447; H03H9/2463; H10; H10P; H10P95/00; H10W; H10W20/00; H10W20/40; H03H2009/02488; H03H2009/02511; H03H2009/02519; H04; H04R; H04R17/00; H04R17/04; H04R17/08
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
94 words
An integrated semiconductor circuit comprising: a plurality of semiconductor circuit blocks having their respective circuits electrically interconnected by means of beam leads, said integrated circuit including a mechanical resonator formed by that portion of a beam lead element, which is firmly connected to two of said plurality of circuit blocks, which extends beyond the edges of said two circuit blocks, said mechanical resonator having a layer of piezoelectric material on at least a portion of a first surface thereof, and an electrode member disposed on said layer of piezoelectric material, thus defining a transducerresonator.
Claim 2
Dependent Claim
94 words
An integrated semiconductor circuit comprising: a plurality of semiconductor circuit blocks having their respective circuits electrically interconnected by means of beam leads, said integrated circuit including a mechanical resonator formed by that portion of a beam lead element, which is firmly connected to two of said plurality of circuit blocks, which extends beyond the edges of said two circuit blocks, said mechanical resonator having a layer of piezoelectric material on at least a portion of a first surface thereof, and an electrode member disposed on said layer of piezoelectric material, thus defining a transducerresonator.
Claim 3
Dependent Claim
29 words
An integrated circuit defined in claim 1 wherein the beam lead element forming said mechanical resonator comprises one of said beam leads interconnecting the circuits in said circuit blocks.
Claim 4
Dependent Claim
22 words
An integrated semiconductor circuit as defined in claim 1 wherein said mechanical resonators have the characteristic of being excitable by flexural vibrations.
Claim 5
Dependent Claim
22 words
An integrated semiconductor circuit as defined in claim 1 wherein said mechanical resonators have the characteristic of being excitable by torsional vibrations.
Claim 6
Dependent Claim
57 words
An integrated semiconductor circuit as defined in claim 1 wherein said mechanical resonator has a further layer of piezoelectric material provided on the surface thereof opposite said first surface and an additional electrode member is provided on said further layer of piezoelectric material, thus defining a transducer-resonator having transducers on opposite surfaces of said same mechanical resonator.
Claim 7
Dependent Claim
50 words
An integrated semiconductor circuit as defined in claim 1 wherein said mechanical resonator has a further piezoelectric layer provided on said first surface thereof and a further electrode member is provided on said further piezoelectric layer, thus defining a transducer-resonator having at least two transducers provided on the same surface.
Claim 8
Dependent Claim
59 words
An integrated semiconductor circuit as defined in claim 1 wherein there are a plurality of said mechanical resonators, two of which are said transducer-resonators and comprise an input and output transducer-resonator, respectively, and a coupling element is provided for connecting the remaining mechanical resonators and said input and output transducer-resonators to one another thereby defining a multicircuit mechanical filter.
Claim 9
Dependent Claim
35 words
An integrated semiconductor circuit as defined in claim 7 wherein said coupling element is a thin, continuous, wirelike, structures and are firmly connect to said remaining mechanical resonators and said input and output transducers, respectively.
Claim 10
Dependent Claim
15 words
An integrated semiconductor circuit as defined in claim 8 wherein said coupling element is vapor-deposited.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-02-22 | 1974-08-24 | 1975-02-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-02-22 | 1978-08-24 | 1979-02-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-02-22 | 1982-08-24 | 1983-02-23 | $7700.00 | Window Closed / Lapsed |