Detecting and measuring apparatus using polarization interferometry
Abstract
Abstract A DETECING AND MEASURING SYSTEM USING POLARIZATION INTERFERENCE OPTICS COMPRISING A SOURCE OF POLARIZED COHERENT ILLUMINATION, AN OBJECT IN THE COHERENT LIGHT FIELD, AN OBJECTIVE FOCUSING LENS SYSTEM AND A BIREFRINGENT ELEMENT OR ELEMENTS FOR SPLITTING AND DISPLACING LIGHT RAYS. MEANS ARE PROVIDED FOR ALTERING COMPENSATION BY CHANGING POSITION OF BIREFRINGENT ELEMENT OR BY CHANGING THE ANGLE OF COHERENT LIGHT SOURCE. ANALYSER MEANS ARE PROVIDED FOR CAUSING INTERFERENCE OF DISPLAYED LIGHT RAYS AS IS A PHOTO DETECTOR MEANS FOR ELECTRICALLY INDICATING THE MINUTE CHANGES IN LIGHT INTENSITY THAT RESULT FROM THE INTEFERING LIGHT RAYS. BEAM SPLITTING MEANS ARE PROVIDED FOR DIRECTING INTERFERING RAYS FROM THE ANALYZER TO THE PHOTO DETECTOR AND/OR TO AN EYE PIECE. VARIABLE DENSITY FILTER MEANS ARE PLACED BETWEEN THE ANALYZER MEANS AND THE PHOTO DETECTOR MEANS TO CONTROL LEVEL OF LIGHT INTENSITY. THERE MAY BE PROVIDED COUPLING MEANS FOR COUPLING MOTION OF AN EXTERNAL OBJECT TO THE STAGE OR COMPENSATOR FOR DETECTING MINUTE MOTIONS OF THE OBJECT.
Inventors
- 👤 Robert Hoffman
Bibliographic Details
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