US3560358A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electrolytic etching of platinum for metallization
Assignee: Motorola Solutions Inc
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Filing: 1968-09-12
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Granted: 1971-02-02
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Expires: 1988-09-12
Abstract
Abstract A PLATINUM THIN FILM IS PATTERENED BY A SELECTIVE ETCHING PROCESS, INCLUDING THE STEP OF DEPOSITING THE PLATINUM FILM ON A CONDUCTIVE SUBSTRATE, FOLLOWED BY THE APPLICATION OF A PHOTORESIST FILM ON THE PLATINUM FILM, PATTERENED IN THE SAME IMAGE AS DESIRED IN THE PLATINUM. THE COMPOSITE STRUCTURE IS THEN SUBJECTED TO ALTERNATION CURRENT ELECTROLYSIS IN A BATH COMPRISING AN ELECTROLYTE WHICH FORMS A SOLUBLE COMPLEX WITH THE PLATINUM. THE TECHNIQUE IS SPECIFICALLY APPLIED TO THE FACRICATION OF SEMICONDUCTOR DEVICES WITH TITANIUM-PLATINUM METALLIZATION.
Inventors
- 👤 James R Black
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 06:40
CPC Classifications
H; H10; H10P; H10P95/00; C; C25; C25F; C25F3/00; C25F3/02; H10W; H10W20/00; H10W20/40
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-02-01 | 1974-08-03 | 1975-02-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-02-01 | 1978-08-03 | 1979-02-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-02-01 | 1982-08-03 | 1983-02-02 | $7700.00 | Window Closed / Lapsed |