Method of producing air-isolated integrated circuits
Abstract
Abstract ISLANDS OF DIELECTRICALLY ISOLATED MONOCRYSTALLINE SILICON, FABRICATED IN A POLYCRYSTALLINE BASE, ARE FIRST PRODUCED. DEVICE FABRICATION AND BEAM LEAD INTERCONNECTION FOLLOW. THEREAFTER THE PLANAR TOP SURFACE IS COVERED WITH AN ETCH-RESISTANT WAX AND THE POLYCRYSTALLINE BASE IS REMOVED BY ETCHING. IN ANOTHER EMBODIMENT, SIO2 IS GROWN ON A GROOVED, MONOCRYSTALLINE SILICON SLICE, AND POLYCRYSTALLINE SILICON IS DEPOSITED THEREOVER. THE SLICE IS THEN LAPPED DOWN ON THE TOP SIDE SO THAT THE POLYCRYSTALLINE SILICON AND SIO2 FORM BARRIERS. SECOND SIDE IS LAPPED AFTER DEVICES ARE FABRICATED AND AFTER BEAM LEADS ARE FORMED. ACTIVE DEVICES AND BEAM LEADS ARE FABRICATED ON ONE SURFACE, AND THE POLYCRYSTALLINE MATERIAL IS LAPPED AND ETCHED AWAY FROM THE BACK. IN EITHER CASE, THE REMAINING STRUCTURE IS AN AIR-ISOLATED BEAM LEAD DEVICE.
Inventors
- 👤 Bernard L Kravitz
Bibliographic Details
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