Patent US3556966A successfully refreshed from Google Patents.
US3556966A
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Plasma anodizing aluminium coatings on a semiconductor
Assignee: RCA Corp
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Filing: 1968-01-19
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Granted: 1971-01-19
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Expires: 1988-01-19
Abstract
Abstract ALUMINUM OXIDE, MADE BY DEPOSITING A LAYER OF METALLIC ALUMINUM ON THE SURFACE OF A BODY OF SEMICONDUCTIVE MATERIAL AND THEN ANODIZING THE ALUMINUM WITH IONS FROM AN OXYGEN PLASMA, IS EMPLOYED AS AN ENCAPSULATING COATING AND AS AN INSULATING LAYER IN A SEMICONDUCTOR DEVICE. AC- TIVE DEVICES FORMED IN THE SEMICONDUCTIVE MATERIAL ADJACENT TO THE COATED SURFACE ARE STABLE AND RADIATION RESISTANT.
Inventors
- 👤 Albert Waxman
- 👤 Karl H Zaininger
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 22:25
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6302; H10P14/6324; C; C23; C23C; C23C8/00; C23C8/06; C23C8/36; C25; C25D; C25D11/00; C25D11/005; C25D11/02; C25D11/026; H10D; H10D84/00; H10D84/40; H10D84/401; H10D99/00; H10P14/6304; H10P14/6314; H10P14/6319; H10P14/65; H10P14/6516; H10P14/69; H10P14/692; H10P14/6938; H10P14/6939; H10P14/69391; Y; Y10; Y10S; Y10S148/00; Y10S148/085; Y10S438/00; Y10S438/91
Claims Analysis
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References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-01-18 | 1974-07-20 | 1975-01-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-01-18 | 1978-07-20 | 1979-01-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-01-18 | 1982-07-20 | 1983-01-19 | $7700.00 | Window Closed / Lapsed |