Patent US3556048A successfully refreshed from Google Patents.
US3556048A
Expired / Lapsed
US
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Vacuum evaporator with electromagnetic ion steering
Assignee: National Aeronautics and Space Administration
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Filing: 1968-09-05
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Granted: 1971-01-19
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Expires: 1988-09-05
Abstract
Abstract An apparatus for vaporizing material in a high vacuum chamber is disclosed. The apparatus includes an electromagnetic arrangement comprising a plurality of coils. The coils are controllably energized to produce a rotating magnetic field in the path of the vaporized material or ions to controllably steer them to selected points of the chamber''s inner surface.
Inventors
- 👤 Robert E Frazer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 19:17
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/32; H; H01; H01J; H01J37/00; H01J37/30; H01J37/305; H01J37/3053; H01J37/317; H01J37/3178
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
66 words
Apparatus for producing a film of a vaporizable substance comprising: a vacuumtight housing; an open-topped crucible for holding a substance to be evaporated; means for vaporizing said substance to convert at least a part thereof; and electromagnetic means positioned in a plane above said crucible for providing a rotating magnetic field to control the direction of said vaporized substance toward a selected surface in said housing.
Claim 2
Dependent Claim
66 words
Apparatus for producing a film of a vaporizable substance comprising: a vacuumtight housing; an open-topped crucible for holding a substance to be evaporated; means for vaporizing said substance to convert at least a part thereof; and electromagnetic means positioned in a plane above said crucible for providing a rotating magnetic field to control the direction of said vaporized substance toward a selected surface in said housing.
Claim 3
Dependent Claim
26 words
The apparatus as recited in claim 1 wherein said electromagnetic means for providing a rotating magnetic field surrounds an area through which flows said vaporized substance.
Claim 4
Dependent Claim
39 words
The apparatus as recited in claim 2 wherein said means for vaporizing include a plurality of electron guns, and means providing power to said guns to direct streams of electrons to heat and vaporize said substance by electron bombardment.
Claim 5
Dependent Claim
50 words
The apparatus as recited in claim 3 wherein said electromagnetic means include a plurality of coils disposed above said crucible, and servo controlled power supply means for controlling the amplitudes and relative phases of electrical current supplied to said coils to produce a magnetic field rotating at a preselected rate.
Claim 6
Dependent Claim
31 words
The apparatus as recited in claim 4 wherein said electromagnetic means include a ring disposed In said plane and said plurality of coils being wound and equidistantly spaced on said ring.
Claim 7
Dependent Claim
43 words
In a vacuum deposition apparatus for vaporizing a vaporizable material, means for vaporizing said material to form ions, the improvement comprising; electromagnetic means surrounding a portion of the path of said ions to provide a rotating magnetic field for controlling the directions thereof.
Claim 8
Dependent Claim
43 words
In a vacuum deposition apparatus for vaporizing a vaporizable material, means for vaporizing said material to form ions, the improvement comprising; electromagnetic means surrounding a portion of the path of said ions to provide a rotating magnetic field for controlling the directions thereof.
Claim 9
Dependent Claim
55 words
The apparatus as recited in claim 6 wherein said electromagnetic means comprise a plurality of windings surrounding an area in the path of said ions and means for energizing said windings to produce an electromagnetic field of selected characteristics which extends across said path to control the direction of flow of the ions passing therethrough.
Claim 10
Dependent Claim
21 words
The apparatus as recited in claim 7 wherein the number of windings is at least three, equidistantly spaced from one another.
Claim 11
Dependent Claim
26 words
The apparatus as recited in claim 8 wherein said means for energizing provide said three windings with a polyphase current to produce said rotating magnetic field.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-01-18 | 1974-07-20 | 1975-01-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-01-18 | 1978-07-20 | 1979-01-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-01-18 | 1982-07-20 | 1983-01-19 | $7700.00 | Window Closed / Lapsed |