Patent US1732274A successfully refreshed from Google Patents.
Patent US3052915A successfully refreshed from Google Patents.
Patent US3511727A successfully refreshed from Google Patents.
US3511727A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vapor phase etching and polishing of semiconductors
Assignee: Motorola Solutions Inc
•
Filing: 1967-05-08
•
Granted: 1970-05-12
•
Expires: 1987-05-08
Abstract
No abstract record available.
Inventors
- 👤 Robert G Hays
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 13:40
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/20; H10P50/24; H10P50/242; C; C23; C23F; C23F1/00; C23F1/10; C23F1/12; Y; Y10; Y10S; Y10S148/00; Y10S148/051; Y10S148/054; Y10S438/00; Y10S438/974
Claims Analysis
Total Claims: 0
No claims parsed yet. Click Sync Now above to re-index claims from Google Patents.
References Cited (Backward Citations)
US3243323A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1973-05-11 | 1973-11-10 | 1974-05-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1977-05-11 | 1977-11-10 | 1978-05-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1981-05-11 | 1981-11-10 | 1982-05-12 | $7700.00 | Window Closed / Lapsed |