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US3501336A Expired / Lapsed US ⏱️ 0.0 years remaining

Method for etching single crystal silicon substrates and depositing silicon thereon

Assignee: Texas Instruments Inc
•
Filing: 1967-12-11
•
Granted: 1970-03-17
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Expires: 1987-12-11
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Abstract

No abstract record available.

Inventors

  • 👤 Lawrence D Dyer
  • 👤 Ronald C Bracken
  • 👤 Guy W Taylor

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-24 14:17
CPC Classifications
C; C30; C30B; C30B29/00; C30B29/02; C30B29/06; C30B33/00; C30B33/08; C30B33/12; Y; Y10; Y10S; Y10S148/00; Y10S148/007; Y10S148/051; Y10S148/054; Y10S438/00; Y10S438/974

Claims Analysis

Total Claims: 0
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References Cited (Backward Citations)

US3243323A Cited
US3370995A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1973-03-16 1973-09-15 1974-03-17 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1977-03-16 1977-09-15 1978-03-17 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1981-03-16 1981-09-15 1982-03-17 $7700.00 Window Closed / Lapsed

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