Patent US3499805A successfully refreshed from Google Patents.
US3499805A
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US
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Process for deep etching a silicon wafer
Assignee: United States Department of the Air Force
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Filing: 1966-08-29
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Granted: 1970-03-10
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Expires: 1986-08-29
Abstract
No abstract record available.
Inventors
- 👤 Charles G Brooks
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 14:36
CPC Classifications
C; C23; C23F; C23F1/00; C23F1/02; H; H10; H10P; H10P50/00; H10P50/69; H10P50/691; H10P50/692; H10P50/693; H10P50/695; H10P95/00; Y; Y10; Y10S; Y10S438/00; Y10S438/942
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1973-03-09 | 1973-09-08 | 1974-03-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1977-03-09 | 1977-09-08 | 1978-03-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1981-03-09 | 1981-09-08 | 1982-03-10 | $7700.00 | Window Closed / Lapsed |