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US3475315A Expired / Lapsed US ⏱️ 0.0 years remaining

Cathodic sputtering apparatus wherein the sputtering plasma is generated by a plurality of electrically isolated circuits

Assignee: Bendix Corp
•
Filing: 1966-04-11
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Granted: 1969-10-28
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Expires: 1986-04-11
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Abstract

No abstract record available.

Inventors

  • 👤 Roger M Moseson

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 03:12
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3471; C23C14/3478; H; H01; H01J; H01J37/00; H01J37/32; H01J37/34

Claims Analysis

Total Claims: 0
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References Cited (Backward Citations)

US3021271A Cited
US3324019A Cited
US3361659A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1972-10-27 1973-04-28 1973-10-28 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1976-10-27 1977-04-28 1977-10-28 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1980-10-27 1981-04-28 1981-10-28 $7700.00 Window Closed / Lapsed

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