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US3461003A
Expired / Lapsed
US
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Method of fabricating a semiconductor structure with an electrically isolated region of semiconductor material
Assignee: Motorola Solutions Inc
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Filing: 1964-12-14
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Granted: 1969-08-12
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Expires: 1984-12-14
Abstract
No abstract record available.
Inventors
- 👤 Don M Jackson Jr
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 07:16
CPC Classifications
H; H10; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/019; H10W10/10; Y; Y10; Y10S; Y10S148/00; Y10S148/026; Y10S148/085; Y10S148/115; Y10S438/00; Y10S438/977
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
77 words
A METHOD OF FORMING A SEMICONDUCTOR STRUCTURE COMPRISING THE STEPS OF: (A) PROVIDING A CRYSTALLINE BODY; (B) MASKING A SURFACE OF SAID BODY SO THAT A PORTION OF THE SURFACE IS EXPOSED; (C) GROWING AN EPITAXIAL LAYER ON SAID EXPOSED PORTION OF SAID BODY; (D) DEPOSITING A LAYER OF ISOLATING SUBSTANCE OVER SAID EPITAXIAL LAYER; (E) FORMING A CRYSTALLINE SUBSTRATE OVER SAID LAYER OF ISOLATING SUBSTANCE; AND (F) REMOVING AT LEAST A PORTION OF SAID FIRST BODY.
Claim 2
Independent Claim
77 words
A METHOD OF FORMING A SEMICONDUCTOR STRUCTURE COMPRISING THE STEPS OF: (A) PROVIDING A CRYSTALLINE BODY; (B) MASKING A SURFACE OF SAID BODY SO THAT A PORTION OF THE SURFACE IS EXPOSED; (C) GROWING AN EPITAXIAL LAYER ON SAID EXPOSED PORTION OF SAID BODY; (D) DEPOSITING A LAYER OF ISOLATING SUBSTANCE OVER SAID EPITAXIAL LAYER; (E) FORMING A CRYSTALLINE SUBSTRATE OVER SAID LAYER OF ISOLATING SUBSTANCE; AND (F) REMOVING AT LEAST A PORTION OF SAID FIRST BODY.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1972-08-11 | 1973-02-10 | 1973-08-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1976-08-11 | 1977-02-10 | 1977-08-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1980-08-11 | 1981-02-10 | 1981-08-12 | $7700.00 | Window Closed / Lapsed |