Patent US3432416A successfully refreshed from Google Patents.
US3432416A
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High purity niobium films formed by glow discharge cathode sputtering
Assignee: General Electric Co
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Filing: 1966-10-03
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Granted: 1969-03-11
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Expires: 1986-10-03
Abstract
No abstract record available.
Inventors
- 👤 John R Rairden
- 👤 James T Furey
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 09:23
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/54; C23C14/541; H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H10; H10N; H10N60/00; Y; Y10; Y10S; Y10S505/00; Y10S505/80; Y10S505/815; Y10S505/816; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49014
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
117 words
A METHOD OF DEPOSITING HIGH PURITY NIOBIUM FILMS ON A SUBSTRATE WHICH COMPRISES POSITIONING AT LEAST ONE SUBSTRATE WITHIN A CHAMBER, POSITIONING A NIOBIUM MEMBER WITHIN SAID CHAMBER IN PROXIMATE POSITION WITH SAID SUBSTRATE, INTRODUCING AN INERT GASEOUS ATMOSPHERE INTO SAID CHAMBER, PREHEATING SAID SUBSTRATE TO A TEMPERATURE IN EXCESS OF 25*C., ELECTRICALLY ENERGIZING SAID NIOBIUM MEMBER AT A POTENTIAL TO PRODUCE RAPID SPUTTERING OF SAID MEMBER AND ELEVATE THE SURFACE TEMPERATURE OF SAID MEMBER ABOVE 800*C., INCREASING THE THERMAL CONTENT OF SAID SUBSTRATE TO PRODUCE A TEMPERATURE IN THE RANGE OF FROM 535*C. TO 690*C. UPON THE SURFACE OF THE SUBSTRATE REMOTE FROM SAID NIOBIUM MEMBER, AND CONDENSING ON SAID HEATED SUBSTRATE A FILM EXHIBITING SUPERCONDUCTIVITY.
Claim 2
Independent Claim
117 words
A METHOD OF DEPOSITING HIGH PURITY NIOBIUM FILMS ON A SUBSTRATE WHICH COMPRISES POSITIONING AT LEAST ONE SUBSTRATE WITHIN A CHAMBER, POSITIONING A NIOBIUM MEMBER WITHIN SAID CHAMBER IN PROXIMATE POSITION WITH SAID SUBSTRATE, INTRODUCING AN INERT GASEOUS ATMOSPHERE INTO SAID CHAMBER, PREHEATING SAID SUBSTRATE TO A TEMPERATURE IN EXCESS OF 25*C., ELECTRICALLY ENERGIZING SAID NIOBIUM MEMBER AT A POTENTIAL TO PRODUCE RAPID SPUTTERING OF SAID MEMBER AND ELEVATE THE SURFACE TEMPERATURE OF SAID MEMBER ABOVE 800*C., INCREASING THE THERMAL CONTENT OF SAID SUBSTRATE TO PRODUCE A TEMPERATURE IN THE RANGE OF FROM 535*C. TO 690*C. UPON THE SURFACE OF THE SUBSTRATE REMOTE FROM SAID NIOBIUM MEMBER, AND CONDENSING ON SAID HEATED SUBSTRATE A FILM EXHIBITING SUPERCONDUCTIVITY.
References Cited (Backward Citations)
US3271285A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1972-03-10 | 1972-09-09 | 1973-03-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1976-03-10 | 1976-09-09 | 1977-03-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1980-03-10 | 1980-09-09 | 1981-03-11 | $7700.00 | Window Closed / Lapsed |