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US3420704A Expired / Lapsed US ⏱️ 0.0 years remaining

Depositing semiconductor films utilizing a thermal gradient

Assignee: National Aeronautics and Space Administration
•
Filing: 1966-08-19
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Granted: 1969-01-07
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Expires: 1986-08-19
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Abstract

No abstract record available.

Inventors

  • 👤 Robert L Ramey
  • 👤 William D Mclennan

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-26 14:34
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/54; C23C14/541; Y; Y10; Y10S; Y10S148/00; Y10S148/169; Y10T; Y10T428/00; Y10T428/31504; Y10T428/31678

Claims Analysis

Total Claims: 0
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References Cited (Backward Citations)

US3160522A Cited
US3335038A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1972-01-07 1972-07-08 1973-01-07 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1976-01-07 1976-07-08 1977-01-07 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1980-01-07 1980-07-08 1981-01-07 $7700.00 Window Closed / Lapsed

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